| Original language | English |
|---|---|
| Title of host publication | Chemistry in the Semiconductor Industry |
| Publisher | Blackie |
| ISBN (Print) | 9780216920057 |
| Publication status | Published - 1987 |
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Plasma Enhanced Chemical Vapour Deposition
- Phillip John
- , Barbara L. Jones
Research output: Chapter in Book/Report/Conference proceeding › Chapter (peer-reviewed) › peer-review