Plasma Enhanced Chemical Vapour Deposition

Phillip John, Barbara L. Jones

Research output: Chapter in Book/Report/Conference proceedingChapter (peer-reviewed)

Original languageEnglish
Title of host publicationChemistry in the Semiconductor Industry
ISBN (Print)9780216920057
Publication statusPublished - 1987

Cite this

John, P., & Jones, B. L. (1987). Plasma Enhanced Chemical Vapour Deposition. In Chemistry in the Semiconductor Industry Blackie.