Plasma deposition of chalcogenide glass

D. Blanc, J. I B Wilson

Research output: Contribution to journalArticle

Abstract

Plasma-enhanced chemical vapour deposition of chlorides has been used to deposit GeSe glass for infrared applications. Early results confirm that with suitable rf generators and deposition chamber geometry, the method should be capable of the high growth rates necessary for infrared fibre optic preforms. © 1985.

Original languageEnglish
Pages (from-to)1129-1132
Number of pages4
JournalJournal of Non-Crystalline Solids
Volume77-78
Issue numberPART 2
Publication statusPublished - 2 Dec 1985

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