Glow-discharge a-Si1-x:Cx:H deposited from silane and propane have been studied in the high carbon concentration range (x~0.5 to ~0.7, according to XPS) in view of their interesting photo-oxidation property. These carbon-rich films have three dominant microstructures: diamond-like, porous and polymer-like, at increasing carbon composition. The basic polymeric unit is CH2, and the porosity is due to the SiCH3 bond terminating groups. The ease of photo-oxidation, as measured by the depth of the oxide after periods of UV illumination, correlates with the porosity of these films, rather than a simple correlation with carbon content. © 1993.
|Number of pages||4|
|Journal||Journal of Non-Crystalline Solids|
|Issue number||PART 2|
|Publication status||Published - 2 Dec 1993|