Abstract
Glow-discharge a-Si1-x:Cx:H deposited from silane and propane have been studied in the high carbon concentration range (x~0.5 to ~0.7, according to XPS) in view of their interesting photo-oxidation property. These carbon-rich films have three dominant microstructures: diamond-like, porous and polymer-like, at increasing carbon composition. The basic polymeric unit is CH2, and the porosity is due to the SiCH3 bond terminating groups. The ease of photo-oxidation, as measured by the depth of the oxide after periods of UV illumination, correlates with the porosity of these films, rather than a simple correlation with carbon content. © 1993.
Original language | English |
---|---|
Pages (from-to) | 1051-1054 |
Number of pages | 4 |
Journal | Journal of Non-Crystalline Solids |
Volume | 164-166 |
Issue number | PART 2 |
Publication status | Published - 2 Dec 1993 |