| Original language | English |
|---|---|
| Pages (from-to) | 696-698 |
| Number of pages | 3 |
| Journal | Semiconductor Science and Technology |
| Volume | 4 |
| Issue number | 8 |
| Publication status | Published - Aug 1989 |
| Original language | English |
|---|---|
| Pages (from-to) | 696-698 |
| Number of pages | 3 |
| Journal | Semiconductor Science and Technology |
| Volume | 4 |
| Issue number | 8 |
| Publication status | Published - Aug 1989 |