Optimization and fabrication of grating beamsplitters in silicon nitride

M. R. Taghizadeh, J. I B Wilson, J. Turunen, A. Vasara, J. Westerholm

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)


We report for the first time the generation of optimized space-invariant fan-out elements, so-called Dammann gratings [H. Dammann and K. Görtler, Opt. Commun. 3, 312 (1971)] in plasma silicon nitride. Diffraction efficiencies as high as 65% have been achieved. Using simulated annealing and the greedy algorithm, grating structures with fan-out as large as 201×201 can readily be calculated. Low absorption and high optical quality together with its ease of structuring make silicon nitride an ideal medium for the construction of phase-only optical elements.

Original languageEnglish
Pages (from-to)1492-1494
Number of pages3
JournalApplied Physics Letters
Issue number16
Publication statusPublished - 1989


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