Optimization and fabrication of grating beamsplitters in silicon nitride

M. R. Taghizadeh, J. I B Wilson, J. Turunen, A. Vasara, J. Westerholm

Research output: Contribution to journalArticle

Abstract

We report for the first time the generation of optimized space-invariant fan-out elements, so-called Dammann gratings [H. Dammann and K. Görtler, Opt. Commun. 3, 312 (1971)] in plasma silicon nitride. Diffraction efficiencies as high as 65% have been achieved. Using simulated annealing and the greedy algorithm, grating structures with fan-out as large as 201×201 can readily be calculated. Low absorption and high optical quality together with its ease of structuring make silicon nitride an ideal medium for the construction of phase-only optical elements.

Original languageEnglish
Pages (from-to)1492-1494
Number of pages3
JournalApplied Physics Letters
Volume54
Issue number16
DOIs
Publication statusPublished - 1989

Fingerprint

fans
silicon nitrides
greedy algorithms
gratings
fabrication
optimization
simulated annealing
diffraction

Cite this

Taghizadeh, M. R., Wilson, J. I. B., Turunen, J., Vasara, A., & Westerholm, J. (1989). Optimization and fabrication of grating beamsplitters in silicon nitride. Applied Physics Letters, 54(16), 1492-1494. https://doi.org/10.1063/1.101331
Taghizadeh, M. R. ; Wilson, J. I B ; Turunen, J. ; Vasara, A. ; Westerholm, J. / Optimization and fabrication of grating beamsplitters in silicon nitride. In: Applied Physics Letters. 1989 ; Vol. 54, No. 16. pp. 1492-1494.
@article{5da8539ca117454cb3335fcdcb575953,
title = "Optimization and fabrication of grating beamsplitters in silicon nitride",
abstract = "We report for the first time the generation of optimized space-invariant fan-out elements, so-called Dammann gratings [H. Dammann and K. G{\"o}rtler, Opt. Commun. 3, 312 (1971)] in plasma silicon nitride. Diffraction efficiencies as high as 65{\%} have been achieved. Using simulated annealing and the greedy algorithm, grating structures with fan-out as large as 201×201 can readily be calculated. Low absorption and high optical quality together with its ease of structuring make silicon nitride an ideal medium for the construction of phase-only optical elements.",
author = "Taghizadeh, {M. R.} and Wilson, {J. I B} and J. Turunen and A. Vasara and J. Westerholm",
year = "1989",
doi = "10.1063/1.101331",
language = "English",
volume = "54",
pages = "1492--1494",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "16",

}

Taghizadeh, MR, Wilson, JIB, Turunen, J, Vasara, A & Westerholm, J 1989, 'Optimization and fabrication of grating beamsplitters in silicon nitride', Applied Physics Letters, vol. 54, no. 16, pp. 1492-1494. https://doi.org/10.1063/1.101331

Optimization and fabrication of grating beamsplitters in silicon nitride. / Taghizadeh, M. R.; Wilson, J. I B; Turunen, J.; Vasara, A.; Westerholm, J.

In: Applied Physics Letters, Vol. 54, No. 16, 1989, p. 1492-1494.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Optimization and fabrication of grating beamsplitters in silicon nitride

AU - Taghizadeh, M. R.

AU - Wilson, J. I B

AU - Turunen, J.

AU - Vasara, A.

AU - Westerholm, J.

PY - 1989

Y1 - 1989

N2 - We report for the first time the generation of optimized space-invariant fan-out elements, so-called Dammann gratings [H. Dammann and K. Görtler, Opt. Commun. 3, 312 (1971)] in plasma silicon nitride. Diffraction efficiencies as high as 65% have been achieved. Using simulated annealing and the greedy algorithm, grating structures with fan-out as large as 201×201 can readily be calculated. Low absorption and high optical quality together with its ease of structuring make silicon nitride an ideal medium for the construction of phase-only optical elements.

AB - We report for the first time the generation of optimized space-invariant fan-out elements, so-called Dammann gratings [H. Dammann and K. Görtler, Opt. Commun. 3, 312 (1971)] in plasma silicon nitride. Diffraction efficiencies as high as 65% have been achieved. Using simulated annealing and the greedy algorithm, grating structures with fan-out as large as 201×201 can readily be calculated. Low absorption and high optical quality together with its ease of structuring make silicon nitride an ideal medium for the construction of phase-only optical elements.

UR - http://www.scopus.com/inward/record.url?scp=0010964736&partnerID=8YFLogxK

U2 - 10.1063/1.101331

DO - 10.1063/1.101331

M3 - Article

VL - 54

SP - 1492

EP - 1494

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 16

ER -

Taghizadeh MR, Wilson JIB, Turunen J, Vasara A, Westerholm J. Optimization and fabrication of grating beamsplitters in silicon nitride. Applied Physics Letters. 1989;54(16):1492-1494. https://doi.org/10.1063/1.101331