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Dive into the research topics of 'Optimal preamorphization conditions for the formation of highly activated ultra shallow junctions in silicon-on-insulator'. Together they form a unique fingerprint.- Sort by
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J. J. Hamilton*, E. J. H. Collart, M. Bersani, D. Giubertoni, S. Gennaro, Nick Bennett, Nick E. B. Cowern, K. J. Kirkby
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution