Optimal design of the side sensitive group runs double sampling (SSGRDS) x̄ scheme with estimated process parameters

  • Zhi Lin Chong
  • , Wai Chung Yeong
  • , Khai Wah Khaw
  • , XinYing Chew
  • , Wei Lin Teoh

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)
38 Downloads (Pure)

Abstract

The side sensitive group runs double sampling (SSGRDS) x̄ scheme is previously studied under the known process parameters (Case-K) assumption. As the process parameters are hardly known in practical situations, they must be estimated using a suitably chosen in-control (IC) Phase-I sample. However, various studies demonstrated that a substantial amount of Phase-I sample is necessary so that the scheme with unknown process parameters (Case-U) attains a performance almost similar to that of the Case-K counterpart. Since it is challenging to acquire a vast number of IC samples, we examine the optimal designs of the Case-U SSGRDS x̄ scheme such that the average number of observations to signal (ANOS) and expected ANOS (EANOS) are minimised. The optimal parameters obtained for the Case-U SSGRDS x̄ scheme enable it to have a performance comparable to that of the Case-K counterpart, without the need for a large number of Phase-I samples. We show that the Case-U SSGRDS x̄ scheme is effective in identifying the process mean shift of a silicon epitaxial process.
Original languageEnglish
Pages (from-to)487-505
Number of pages19
JournalTransactions of the Institute of Measurement and Control
Volume47
Issue number3
Early online date27 May 2024
DOIs
Publication statusPublished - Feb 2025

Keywords

  • Estimated process parameters
  • optimal design
  • side sensitive group runs double sampling (SSGRDS)
  • steady-state
  • zero-state

ASJC Scopus subject areas

  • Instrumentation

Fingerprint

Dive into the research topics of 'Optimal design of the side sensitive group runs double sampling (SSGRDS) x̄ scheme with estimated process parameters'. Together they form a unique fingerprint.

Cite this