Optimal design of the side sensitive group runs double sampling (SSGRDS) x̄ scheme with estimated process parameters

Zhi Lin Chong, Wai Chung Yeong, Khai Wah Khaw, XinYing Chew, Wei Lin Teoh

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Abstract

The side sensitive group runs double sampling (SSGRDS) x̄ scheme is previously studied under the known process parameters (Case-K) assumption. As the process parameters are hardly known in practical situations, they must be estimated using a suitably chosen in-control (IC) Phase-I sample. However, various studies demonstrated that a substantial amount of Phase-I sample is necessary so that the scheme with unknown process parameters (Case-U) attains a performance almost similar to that of the Case-K counterpart. Since it is challenging to acquire a vast number of IC samples, we examine the optimal designs of the Case-U SSGRDS x̄ scheme such that the average number of observations to signal (ANOS) and expected ANOS (EANOS) are minimised. The optimal parameters obtained for the Case-U SSGRDS x̄ scheme enable it to have a performance comparable to that of the Case-K counterpart, without the need for a large number of Phase-I samples. We show that the Case-U SSGRDS x̄ scheme is effective in identifying the process mean shift of a silicon epitaxial process.
Original languageEnglish
JournalTransactions of the Institute of Measurement and Control
Early online date27 May 2024
DOIs
Publication statusE-pub ahead of print - 27 May 2024

Keywords

  • Estimated process parameters
  • optimal design
  • side sensitive group runs double sampling (SSGRDS)
  • steady-state
  • zero-state

ASJC Scopus subject areas

  • Instrumentation

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