Optically transparent, dense α-Al2O3 thick films deposited on glass at room temperature

Maxim Lebedev; Susan Krumdieck

doi:10.1016/j.cap.2007.10.057

Optically transparent, dense α-Al₂O₃ thick films deposited on glass at room temperature

Maxim Lebedev, Susan Krumdieck^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

Alumina films up to 5 μm thick have been deposited on fused silica and stainless steel substrates by a novel aerosol-jet deposition process at room temperature. The films are dense, uniform and adherent. Moreover, Al₂O₃ film deposited on fused silica substrate is transparent for visible light. Transmittance of 1.5 μm thick alumina film is 83% measured at 800 nm, and that of 5.5 μm thick film is 68%. Scanning electron microscopy images and XRD analysis have revealed that the films have α-Al₂O₃ crystallite structure however crystallite size is order of magnitude smaller than that raw material powder. Vickers microhardness of the films deposited on stainless steel has been measured. Aerosol-jet deposition becomes promising method for surface coating.

Original language	English
Pages (from-to)	233-236
Number of pages	4
Journal	Current Applied Physics
Volume	8
Issue number	3-4
DOIs	https://doi.org/10.1016/j.cap.2007.10.057
Publication status	Published - May 2008

Keywords

42.79.Wc
78.20.-e
81.15.-z
81.20.Rg
81.70.Bt
Aerosol-jet deposition
Aluminium oxide
Hardness
Transparent film

ASJC Scopus subject areas

General Materials Science
General Physics and Astronomy

Access to Document

10.1016/j.cap.2007.10.057

Cite this

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title = "Optically transparent, dense α-Al2O3 thick films deposited on glass at room temperature",

abstract = "Alumina films up to 5 μm thick have been deposited on fused silica and stainless steel substrates by a novel aerosol-jet deposition process at room temperature. The films are dense, uniform and adherent. Moreover, Al2O3 film deposited on fused silica substrate is transparent for visible light. Transmittance of 1.5 μm thick alumina film is 83% measured at 800 nm, and that of 5.5 μm thick film is 68%. Scanning electron microscopy images and XRD analysis have revealed that the films have α-Al2O3 crystallite structure however crystallite size is order of magnitude smaller than that raw material powder. Vickers microhardness of the films deposited on stainless steel has been measured. Aerosol-jet deposition becomes promising method for surface coating.",

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AB - Alumina films up to 5 μm thick have been deposited on fused silica and stainless steel substrates by a novel aerosol-jet deposition process at room temperature. The films are dense, uniform and adherent. Moreover, Al2O3 film deposited on fused silica substrate is transparent for visible light. Transmittance of 1.5 μm thick alumina film is 83% measured at 800 nm, and that of 5.5 μm thick film is 68%. Scanning electron microscopy images and XRD analysis have revealed that the films have α-Al2O3 crystallite structure however crystallite size is order of magnitude smaller than that raw material powder. Vickers microhardness of the films deposited on stainless steel has been measured. Aerosol-jet deposition becomes promising method for surface coating.

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