Optical recording in hydrogenated amorphous silicon

P. John, B. L. Jones

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


An archival optical storage technique based on hydrogen evolution in hydrogenated amorphous silicon (a-Si:H) is presented. Thin films (~0.5 µm) of a-Si:H have been prepared by rf glow discharge in SiH4 and deposited on a thermally grown oxide pattern formed on float zone (111) crystalline Si (c-Si) substrates. Replication of the oxide pattern is achieved by ablation of the a-Si:H layer after annealing. This low-temperature process produces a predesigned array of circular holes caused by bursting of microbubbles in the a-Si:H layer. In comparison, the circular holes nucleate randomly on unoxidized c-Si.

Original languageEnglish
Pages (from-to)39-41
Number of pages3
JournalApplied Physics Letters
Issue number1
Publication statusPublished - 1984


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