We present the development of an ultra-high-resolution high-dynamic-range infrared optical coherence tomography imaging system for the novel purpose of sub-surface inspection of silicon integrated-circuits. Examples of substrate thickness profiling and device feature inspection are demonstrated. © 2010 Optical Society of America.
|Title of host publication||Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010|
|Publication status||Published - 2010|
|Event||2010 Conference on Lasers and Electro-Optics and Quantum Electronics and Laser Science Conference - San Jose, United States|
Duration: 16 May 2010 → 21 May 2010
|Conference||2010 Conference on Lasers and Electro-Optics and Quantum Electronics and Laser Science Conference|
|Abbreviated title||2010 CLEO and QELS|
|Period||16/05/10 → 21/05/10|