Abstract
We present the development of an ultra-high-resolution high-dynamic-range infrared optical coherence tomography imaging system for the novel purpose of sub-surface inspection of silicon integrated-circuits. Examples of substrate thickness profiling and device feature inspection are demonstrated. © 2010 Optical Society of America.
| Original language | English |
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| Title of host publication | Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010 |
| Publication status | Published - 2010 |
| Event | 2010 Conference on Lasers and Electro-Optics and Quantum Electronics and Laser Science Conference - San Jose, United States Duration: 16 May 2010 → 21 May 2010 |
Conference
| Conference | 2010 Conference on Lasers and Electro-Optics and Quantum Electronics and Laser Science Conference |
|---|---|
| Abbreviated title | 2010 CLEO and QELS |
| Country/Territory | United States |
| City | San Jose |
| Period | 16/05/10 → 21/05/10 |