Optical coherence tomography for non-destructive investigation of silicon integrated-circuits

K. A. Serreis, M. K. Renner, D. T. Reid

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present the development of an ultra-high-resolution high-dynamic-range infrared optical coherence tomography imaging system for the novel purpose of sub-surface inspection of silicon integrated-circuits. Examples of substrate thickness profiling and device feature inspection are demonstrated. © 2010 Optical Society of America.

Original languageEnglish
Title of host publicationLasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010
Publication statusPublished - 2010
Event2010 Conference on Lasers and Electro-Optics and Quantum Electronics and Laser Science Conference - San Jose, United States
Duration: 16 May 201021 May 2010

Conference

Conference2010 Conference on Lasers and Electro-Optics and Quantum Electronics and Laser Science Conference
Abbreviated title2010 CLEO and QELS
CountryUnited States
CitySan Jose
Period16/05/1021/05/10

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integrated circuits
inspection
tomography
silicon
dynamic range
high resolution

Cite this

Serreis, K. A., Renner, M. K., & Reid, D. T. (2010). Optical coherence tomography for non-destructive investigation of silicon integrated-circuits. In Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010
Serreis, K. A. ; Renner, M. K. ; Reid, D. T. / Optical coherence tomography for non-destructive investigation of silicon integrated-circuits. Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010. 2010.
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Serreis, KA, Renner, MK & Reid, DT 2010, Optical coherence tomography for non-destructive investigation of silicon integrated-circuits. in Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010. 2010 Conference on Lasers and Electro-Optics and Quantum Electronics and Laser Science Conference, San Jose, United States, 16/05/10.

Optical coherence tomography for non-destructive investigation of silicon integrated-circuits. / Serreis, K. A.; Renner, M. K.; Reid, D. T.

Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010. 2010.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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T1 - Optical coherence tomography for non-destructive investigation of silicon integrated-circuits

AU - Serreis, K. A.

AU - Renner, M. K.

AU - Reid, D. T.

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PY - 2010

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AB - We present the development of an ultra-high-resolution high-dynamic-range infrared optical coherence tomography imaging system for the novel purpose of sub-surface inspection of silicon integrated-circuits. Examples of substrate thickness profiling and device feature inspection are demonstrated. © 2010 Optical Society of America.

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BT - Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010

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Serreis KA, Renner MK, Reid DT. Optical coherence tomography for non-destructive investigation of silicon integrated-circuits. In Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010. 2010