Optical Characterisation of RF Sputter Coated Palladium Thin Films for Hydrogen Sensing

Richard Carter; Peter Morrall; Robert Raimund Josef Maier; Ben Jones; Scott McCulloch; James Barton

Optical Characterisation of RF Sputter Coated Palladium Thin Films for Hydrogen Sensing

Richard Carter, Peter Morrall, Robert Raimund Josef Maier, Ben Jones, Scott McCulloch, James Barton

Research output: Contribution to conference › Poster › peer-review

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Abstract

We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique.

Original language	English
Publication status	Published - 11 May 2011
Event	21st International Conference on Optical Fiber Sensors - Ottawa, ON, Canada Duration: 15 May 2011 → 19 May 2011

Conference

Conference	21st International Conference on Optical Fiber Sensors
Country/Territory	Canada
City	Ottawa, ON
Period	15/05/11 → 19/05/11

Keywords

Sensing
Hydrogen
Palladium
thin film

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Pd Sputter poster finalAccepted author manuscript, 404 KB

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title = "Optical Characterisation of RF Sputter Coated Palladium Thin Films for Hydrogen Sensing",

abstract = "We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique. ",

keywords = "Sensing, Hydrogen, Palladium, thin film",

author = "Richard Carter and Peter Morrall and Maier, {Robert Raimund Josef} and Ben Jones and Scott McCulloch and James Barton",

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day = "11",

language = "English",

note = "21st International Conference on Optical Fiber Sensors ; Conference date: 15-05-2011 Through 19-05-2011",

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TY - CONF

T1 - Optical Characterisation of RF Sputter Coated Palladium Thin Films for Hydrogen Sensing

AU - Carter, Richard

AU - Morrall, Peter

AU - Maier, Robert Raimund Josef

AU - Jones, Ben

AU - McCulloch, Scott

AU - Barton, James

PY - 2011/5/11

Y1 - 2011/5/11

N2 - We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique.

AB - We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique.

KW - Sensing

KW - Hydrogen

KW - Palladium

KW - thin film

M3 - Poster

T2 - 21st International Conference on Optical Fiber Sensors

Y2 - 15 May 2011 through 19 May 2011

ER -

Optical Characterisation of RF Sputter Coated Palladium Thin Films for Hydrogen Sensing

Abstract

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