Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing

Richard M. Carter; Peter Morrall; R. R J Maier; B. J S Jones; Scott McCulloch; James S. Barton

doi:10.1117/12.886057

Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing

Richard M. Carter, Peter Morrall, R. R J Maier, B. J S Jones, Scott McCulloch, James S. Barton

School of Engineering & Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

199 Downloads (Pure)

Abstract

We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

Original language	English
Title of host publication	21st International Conference on Optical Fiber Sensors
Volume	7753
DOIs	https://doi.org/10.1117/12.886057
Publication status	Published - 2011
Event	21st International Conference on Optical Fiber Sensors - Ottawa, ON, Canada Duration: 15 May 2011 → 19 May 2011

Conference

Conference	21st International Conference on Optical Fiber Sensors
Country/Territory	Canada
City	Ottawa, ON
Period	15/05/11 → 19/05/11

Keywords

hydrogen
palladium
sensing
thin film

Access to Document

10.1117/12.886057

OFS final.docAccepted author manuscript, 178 KB

Cite this

@inproceedings{ec7e7e7422164077bddc5d03f3bd37bd,

title = "Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing",

abstract = "We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique. {\textcopyright} 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).",

keywords = "hydrogen, palladium, sensing, thin film",

author = "Carter, {Richard M.} and Peter Morrall and Maier, {R. R J} and Jones, {B. J S} and Scott McCulloch and Barton, {James S.}",

year = "2011",

doi = "10.1117/12.886057",

language = "English",

isbn = "9780819482464",

volume = "7753",

booktitle = "21st International Conference on Optical Fiber Sensors",

note = "21st International Conference on Optical Fiber Sensors ; Conference date: 15-05-2011 Through 19-05-2011",

}

TY - GEN

T1 - Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing

AU - Carter, Richard M.

AU - Morrall, Peter

AU - Maier, R. R J

AU - Jones, B. J S

AU - McCulloch, Scott

AU - Barton, James S.

PY - 2011

Y1 - 2011

N2 - We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

AB - We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

KW - hydrogen

KW - palladium

KW - sensing

KW - thin film

U2 - 10.1117/12.886057

DO - 10.1117/12.886057

M3 - Conference contribution

SN - 9780819482464

VL - 7753

BT - 21st International Conference on Optical Fiber Sensors

T2 - 21st International Conference on Optical Fiber Sensors

Y2 - 15 May 2011 through 19 May 2011

ER -

Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing

Abstract

Conference

Keywords

Access to Document

Fingerprint

Cite this