Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing

Richard M. Carter, Peter Morrall, R. R J Maier, B. J S Jones, Scott McCulloch, James S. Barton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)
118 Downloads (Pure)

Abstract

We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

Original languageEnglish
Title of host publication21st International Conference on Optical Fiber Sensors
Volume7753
DOIs
Publication statusPublished - 2011
Event21st International Conference on Optical Fiber Sensors - Ottawa, ON, Canada
Duration: 15 May 201119 May 2011

Conference

Conference21st International Conference on Optical Fiber Sensors
CountryCanada
CityOttawa, ON
Period15/05/1119/05/11

Keywords

  • hydrogen
  • palladium
  • sensing
  • thin film

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  • Cite this

    Carter, R. M., Morrall, P., Maier, R. R. J., Jones, B. J. S., McCulloch, S., & Barton, J. S. (2011). Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing. In 21st International Conference on Optical Fiber Sensors (Vol. 7753) https://doi.org/10.1117/12.886057