On generation of micro-feature on silicon with an industrial laser

Thet Mon Thet, Tze Chuen Yap, Bidin Noriah, Ishak Mahadzir

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:YAG laser beam of controlled pulse width and power. In phase 1, the irradiations were done without incorporating an assist gas into the process. In phase 2, the compressed air maintaining its pressure at 4 bars, was supplied as an assist gas during laser irradiation. Design of experiment was adopted to systematically determine the number of experimental runs in each phase as well as to fine tune the important parameters through the statistical analysis. Laser-generated structures were observed under scanning electron microscope. Micrographs reveal that most of the features appear to be cone-like with an almost true circle at the base. The diameter of the cone is found to be as small as 200 μm. The quality of such micro-features and analysis of the effect of the process parameters on the feature quality show that in general, laser pulse width has more appreciable effect than the laser power on the micro-feature geometry as well as quality. Laser irradiation without the assist gas produces better results in terms of a feature size.

Original languageEnglish
Title of host publicationAdvances in Materials and Processing Technologies XV
PublisherTrans Tech Publications
Number of pages9
ISBN (Electronic)9783038263029
ISBN (Print)9783037859216
Publication statusPublished - 2014
Event15th International Conference on Advances in Materials and Processing Technologies 2012 - Wollongong, NSW, Australia
Duration: 23 Sept 201223 Sept 2012

Publication series

NameMaterials Science Forum
PublisherTrans Tech Publications
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752


Conference15th International Conference on Advances in Materials and Processing Technologies 2012
Abbreviated titleAMPT 2012
CityWollongong, NSW


  • Experimental design
  • Industrial lasers
  • Micro-cone
  • Silicon micromachining

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials


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