On generation of micro-feature on silicon with an industrial laser

Thet Mon Thet, Tze Chuen Yap, Bidin Noriah, Ishak Mahadzir

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:YAG laser beam of controlled pulse width and power. In phase 1, the irradiations were done without incorporating an assist gas into the process. In phase 2, the compressed air maintaining its pressure at 4 bars, was supplied as an assist gas during laser irradiation. Design of experiment was adopted to systematically determine the number of experimental runs in each phase as well as to fine tune the important parameters through the statistical analysis. Laser-generated structures were observed under scanning electron microscope. Micrographs reveal that most of the features appear to be cone-like with an almost true circle at the base. The diameter of the cone is found to be as small as 200 μm. The quality of such micro-features and analysis of the effect of the process parameters on the feature quality show that in general, laser pulse width has more appreciable effect than the laser power on the micro-feature geometry as well as quality. Laser irradiation without the assist gas produces better results in terms of a feature size.

Original languageEnglish
Title of host publicationAdvances in Materials and Processing Technologies XV
PublisherTrans Tech Publications
Pages661-669
Number of pages9
ISBN (Electronic)9783038263029
ISBN (Print)9783037859216
DOIs
Publication statusPublished - 2014
Event15th International Conference on Advances in Materials and Processing Technologies 2012 - Wollongong, NSW, Australia
Duration: 23 Sep 201223 Sep 2012

Publication series

NameMaterials Science Forum
PublisherTrans Tech Publications
Volume773-774
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference15th International Conference on Advances in Materials and Processing Technologies 2012
Abbreviated titleAMPT 2012
CountryAustralia
CityWollongong, NSW
Period23/09/1223/09/12

Fingerprint

Silicon
Lasers
silicon
Laser beam effects
lasers
Cones
Laser pulses
Gases
irradiation
YAG lasers
cones
pulse duration
Gas lasers
Compressed air
compressed air
Design of experiments
gas lasers
experiment design
Laser beams
Statistical methods

Keywords

  • Experimental design
  • Industrial lasers
  • Micro-cone
  • Silicon micromachining

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Thet, T. M., Yap, T. C., Noriah, B., & Mahadzir, I. (2014). On generation of micro-feature on silicon with an industrial laser. In Advances in Materials and Processing Technologies XV (pp. 661-669). (Materials Science Forum; Vol. 773-774). Trans Tech Publications. https://doi.org/10.4028/www.scientific.net/MSF.773-774.661
Thet, Thet Mon ; Yap, Tze Chuen ; Noriah, Bidin ; Mahadzir, Ishak. / On generation of micro-feature on silicon with an industrial laser. Advances in Materials and Processing Technologies XV. Trans Tech Publications, 2014. pp. 661-669 (Materials Science Forum).
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Thet, TM, Yap, TC, Noriah, B & Mahadzir, I 2014, On generation of micro-feature on silicon with an industrial laser. in Advances in Materials and Processing Technologies XV. Materials Science Forum, vol. 773-774, Trans Tech Publications, pp. 661-669, 15th International Conference on Advances in Materials and Processing Technologies 2012, Wollongong, NSW, Australia, 23/09/12. https://doi.org/10.4028/www.scientific.net/MSF.773-774.661

On generation of micro-feature on silicon with an industrial laser. / Thet, Thet Mon; Yap, Tze Chuen; Noriah, Bidin; Mahadzir, Ishak.

Advances in Materials and Processing Technologies XV. Trans Tech Publications, 2014. p. 661-669 (Materials Science Forum; Vol. 773-774).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:YAG laser beam of controlled pulse width and power. In phase 1, the irradiations were done without incorporating an assist gas into the process. In phase 2, the compressed air maintaining its pressure at 4 bars, was supplied as an assist gas during laser irradiation. Design of experiment was adopted to systematically determine the number of experimental runs in each phase as well as to fine tune the important parameters through the statistical analysis. Laser-generated structures were observed under scanning electron microscope. Micrographs reveal that most of the features appear to be cone-like with an almost true circle at the base. The diameter of the cone is found to be as small as 200 μm. The quality of such micro-features and analysis of the effect of the process parameters on the feature quality show that in general, laser pulse width has more appreciable effect than the laser power on the micro-feature geometry as well as quality. Laser irradiation without the assist gas produces better results in terms of a feature size.

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Thet TM, Yap TC, Noriah B, Mahadzir I. On generation of micro-feature on silicon with an industrial laser. In Advances in Materials and Processing Technologies XV. Trans Tech Publications. 2014. p. 661-669. (Materials Science Forum). https://doi.org/10.4028/www.scientific.net/MSF.773-774.661