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On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

  • G. C. Boisset
  • , B. Robertson
  • , W. S. Hsiao
  • , M. R. Taghizadeh
  • , J. Simmons
  • , K. Song
  • , M. Matin
  • , D. A. Thompson
  • , D. V. Plant

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