On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

G. C. Boisset, B. Robertson, W. S. Hsiao, M. R. Taghizadeh, J. Simmons, K. Song, M. Matin, D. A. Thompson, D. V. Plant

Research output: Contribution to journalArticle

Abstract

A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.

Original languageEnglish
Pages (from-to)918-920
Number of pages3
JournalIEEE Photonics Technology Letters
Volume8
Issue number7
Publication statusPublished - Jul 1996

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Optoelectronic devices
Packaging
Experiments

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Boisset, G. C., Robertson, B., Hsiao, W. S., Taghizadeh, M. R., Simmons, J., Song, K., ... Plant, D. V. (1996). On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays. IEEE Photonics Technology Letters, 8(7), 918-920.
Boisset, G. C. ; Robertson, B. ; Hsiao, W. S. ; Taghizadeh, M. R. ; Simmons, J. ; Song, K. ; Matin, M. ; Thompson, D. A. ; Plant, D. V. / On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays. In: IEEE Photonics Technology Letters. 1996 ; Vol. 8, No. 7. pp. 918-920.
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abstract = "A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.",
author = "Boisset, {G. C.} and B. Robertson and Hsiao, {W. S.} and Taghizadeh, {M. R.} and J. Simmons and K. Song and M. Matin and Thompson, {D. A.} and Plant, {D. V.}",
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Boisset, GC, Robertson, B, Hsiao, WS, Taghizadeh, MR, Simmons, J, Song, K, Matin, M, Thompson, DA & Plant, DV 1996, 'On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays', IEEE Photonics Technology Letters, vol. 8, no. 7, pp. 918-920.

On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays. / Boisset, G. C.; Robertson, B.; Hsiao, W. S.; Taghizadeh, M. R.; Simmons, J.; Song, K.; Matin, M.; Thompson, D. A.; Plant, D. V.

In: IEEE Photonics Technology Letters, Vol. 8, No. 7, 07.1996, p. 918-920.

Research output: Contribution to journalArticle

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AU - Boisset, G. C.

AU - Robertson, B.

AU - Hsiao, W. S.

AU - Taghizadeh, M. R.

AU - Simmons, J.

AU - Song, K.

AU - Matin, M.

AU - Thompson, D. A.

AU - Plant, D. V.

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AB - A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.

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JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

SN - 1041-1135

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Boisset GC, Robertson B, Hsiao WS, Taghizadeh MR, Simmons J, Song K et al. On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays. IEEE Photonics Technology Letters. 1996 Jul;8(7):918-920.