On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

G. C. Boisset, B. Robertson, W. S. Hsiao, M. R. Taghizadeh, J. Simmons, K. Song, M. Matin, D. A. Thompson, D. V. Plant

Research output: Contribution to journalArticle

Abstract

A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.

Original languageEnglish
Pages (from-to)918-920
Number of pages3
JournalIEEE Photonics Technology Letters
Volume8
Issue number7
Publication statusPublished - Jul 1996

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    Boisset, G. C., Robertson, B., Hsiao, W. S., Taghizadeh, M. R., Simmons, J., Song, K., Matin, M., Thompson, D. A., & Plant, D. V. (1996). On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays. IEEE Photonics Technology Letters, 8(7), 918-920.