On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

G. C. Boisset; B. Robertson; W. S. Hsiao; M. R. Taghizadeh; J. Simmons; K. Song; M. Matin; D. A. Thompson; D. V. Plant

On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

G. C. Boisset, B. Robertson, W. S. Hsiao, M. R. Taghizadeh, J. Simmons, K. Song, M. Matin, D. A. Thompson, D. V. Plant

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.

Original language	English
Pages (from-to)	918-920
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	8
Issue number	7
Publication status	Published - Jul 1996

Cite this

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title = "On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays",

abstract = "A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.",

author = "Boisset, {G. C.} and B. Robertson and Hsiao, {W. S.} and Taghizadeh, {M. R.} and J. Simmons and K. Song and M. Matin and Thompson, {D. A.} and Plant, {D. V.}",

year = "1996",

month = jul,

language = "English",

volume = "8",

pages = "918--920",

journal = "IEEE Photonics Technology Letters",

publisher = "IEEE",

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TY - JOUR

T1 - On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

AU - Boisset, G. C.

AU - Robertson, B.

AU - Hsiao, W. S.

AU - Taghizadeh, M. R.

AU - Simmons, J.

AU - Song, K.

AU - Matin, M.

AU - Thompson, D. A.

AU - Plant, D. V.

PY - 1996/7

Y1 - 1996/7

N2 - A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.

AB - A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.

UR - http://www.scopus.com/inward/record.url?scp=0030196557&partnerID=8YFLogxK

M3 - Article

VL - 8

SP - 918

EP - 920

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

IS - 7

ER -

On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

Abstract

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