Novel STM-based depth profiling technique for the electronic characterization of thin film materials

INIS

• surfaces 100%
• depth 100%
• thin films 100%
• scanning tunneling microscopy 100%
• tunneling 60%
• removal 40%
• films 40%
• pulses 40%
• diamonds 40%
• chemical vapor deposition 40%
• correlations 20%
• applications 20%
• spectra 20%
• modifications 20%
• curves 20%
• monitoring 20%
• thickness 20%
• damage 20%
• voltage 20%
• spectroscopy 20%
• doped materials 20%
• electrons 20%
• argon ions 20%
• etching 20%
• ion implantation 20%
• semiconductor devices 20%
• boron ions 20%

Material Science

• Electronic Property 100%
• Chemical Vapor Deposition 100%
• Diamond Films 100%
• Thin Films 100%
• Surface Electronic Property 50%
• Surface Damage 50%
• Film Thickness 50%
• Boron Ion 50%
• Current-Voltage Characteristic 50%
• Semiconductor Device 50%
• Surface Treatment 50%