Nano-impact (fatigue) characterization of as-deposited amorphous nitinol thin film

Nadimul Haque Faisal; Rehan Ahmed; Yong Qing Fu

doi:10.3390/coatings2030195

Nano-impact (fatigue) characterization of as-deposited amorphous nitinol thin film

Nadimul Haque Faisal, Rehan Ahmed, Yong Qing Fu

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

This paper presents nano-impact (low cycle fatigue) behavior of as-deposited amorphous nitinol (TiNi) thin film deposited on Si wafer. The nitinol film was 3.5 µm thick and was deposited by the sputtering process. Nano-impact tests were conducted to comprehend the localized fatigue performance and failure modes of thin film using a calibrated nano-indenter NanoTest™, equipped with standard diamond Berkovich and conical indenter in the load range of 0.5 mN to 100 mN. Each nano-impact test was conducted for a total of 1000 fatigue cycles. Depth sensing approach was adapted to understand the mechanisms of film failure. Based on the depth-time data and surface observations of films using atomic force microscope, it is concluded that the shape of the indenter test probe is critical in inducing the localized indentation stress and film failure. The measurement technique proposed in this paper can be used to optimize the design of nitinol thin films.

Original language	English
Pages (from-to)	195-209
Number of pages	15
Journal	Coatings
Volume	2
Issue number	3
DOIs	https://doi.org/10.3390/coatings2030195
Publication status	Published - 2012

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title = "Nano-impact (fatigue) characterization of as-deposited amorphous nitinol thin film",

abstract = "This paper presents nano-impact (low cycle fatigue) behavior of as-deposited amorphous nitinol (TiNi) thin film deposited on Si wafer. The nitinol film was 3.5 µm thick and was deposited by the sputtering process. Nano-impact tests were conducted to comprehend the localized fatigue performance and failure modes of thin film using a calibrated nano-indenter NanoTest{\texttrademark}, equipped with standard diamond Berkovich and conical indenter in the load range of 0.5 mN to 100 mN. Each nano-impact test was conducted for a total of 1000 fatigue cycles. Depth sensing approach was adapted to understand the mechanisms of film failure. Based on the depth-time data and surface observations of films using atomic force microscope, it is concluded that the shape of the indenter test probe is critical in inducing the localized indentation stress and film failure. The measurement technique proposed in this paper can be used to optimize the design of nitinol thin films. ",

author = "Faisal, {Nadimul Haque} and Rehan Ahmed and Fu, {Yong Qing}",

year = "2012",

doi = "10.3390/coatings2030195",

language = "English",

volume = "2",

pages = "195--209",

journal = "Coatings",

issn = "2079-6412",

publisher = "MDPI",

number = "3",

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TY - JOUR

T1 - Nano-impact (fatigue) characterization of as-deposited amorphous nitinol thin film

AU - Faisal, Nadimul Haque

AU - Ahmed, Rehan

AU - Fu, Yong Qing

PY - 2012

Y1 - 2012

N2 - This paper presents nano-impact (low cycle fatigue) behavior of as-deposited amorphous nitinol (TiNi) thin film deposited on Si wafer. The nitinol film was 3.5 µm thick and was deposited by the sputtering process. Nano-impact tests were conducted to comprehend the localized fatigue performance and failure modes of thin film using a calibrated nano-indenter NanoTest™, equipped with standard diamond Berkovich and conical indenter in the load range of 0.5 mN to 100 mN. Each nano-impact test was conducted for a total of 1000 fatigue cycles. Depth sensing approach was adapted to understand the mechanisms of film failure. Based on the depth-time data and surface observations of films using atomic force microscope, it is concluded that the shape of the indenter test probe is critical in inducing the localized indentation stress and film failure. The measurement technique proposed in this paper can be used to optimize the design of nitinol thin films.

AB - This paper presents nano-impact (low cycle fatigue) behavior of as-deposited amorphous nitinol (TiNi) thin film deposited on Si wafer. The nitinol film was 3.5 µm thick and was deposited by the sputtering process. Nano-impact tests were conducted to comprehend the localized fatigue performance and failure modes of thin film using a calibrated nano-indenter NanoTest™, equipped with standard diamond Berkovich and conical indenter in the load range of 0.5 mN to 100 mN. Each nano-impact test was conducted for a total of 1000 fatigue cycles. Depth sensing approach was adapted to understand the mechanisms of film failure. Based on the depth-time data and surface observations of films using atomic force microscope, it is concluded that the shape of the indenter test probe is critical in inducing the localized indentation stress and film failure. The measurement technique proposed in this paper can be used to optimize the design of nitinol thin films.

U2 - 10.3390/coatings2030195

DO - 10.3390/coatings2030195

M3 - Article

SN - 2079-6412

VL - 2

SP - 195

EP - 209

JO - Coatings

JF - Coatings

IS - 3

ER -

Nano-impact (fatigue) characterization of as-deposited amorphous nitinol thin film

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