Abstract
A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed.
| Original language | English |
|---|---|
| Pages (from-to) | 214-223 |
| Number of pages | 10 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 7 |
| Issue number | 2 |
| Publication status | Published - Jun 1998 |
Keywords
- Electrostatic
- LIGA process
- Synchronous control
- Wobble motor
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