Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control

V. D. Samper; A. J. Sangster; R. L. Reuben; U. Wallrabe

Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control

V. D. Samper, A. J. Sangster, R. L. Reuben, U. Wallrabe

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed.

Original language	English
Pages (from-to)	214-223
Number of pages	10
Journal	Journal of Microelectromechanical Systems
Volume	7
Issue number	2
Publication status	Published - Jun 1998

Keywords

Electrostatic
LIGA process
Synchronous control
Wobble motor

Cite this

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abstract = "A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed.",

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AU - Samper, V. D.

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AU - Reuben, R. L.

AU - Wallrabe, U.

PY - 1998/6

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N2 - A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed.

AB - A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed.

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KW - LIGA process

KW - Synchronous control

KW - Wobble motor

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Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control

Abstract

Keywords

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