A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed.
|Number of pages||10|
|Journal||Journal of Microelectromechanical Systems|
|Publication status||Published - Jun 1998|
- LIGA process
- Synchronous control
- Wobble motor