Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control

V. D. Samper, A. J. Sangster, R. L. Reuben, U. Wallrabe

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed.

Original languageEnglish
Pages (from-to)214-223
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume7
Issue number2
Publication statusPublished - Jun 1998

Keywords

  • Electrostatic
  • LIGA process
  • Synchronous control
  • Wobble motor

Fingerprint Dive into the research topics of 'Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control'. Together they form a unique fingerprint.

Cite this