Multi-stator LIGA fabricated electrostatic wobble motors with integrated syncronous control.

V D Samper, A J Sangster, Robert Lewis Reuben, U Wallrabe

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	214-223
Number of pages	10
Journal	Journal of Microelectromechanical Systems
Volume	7
Publication status	Published - 1998

Cite this

@article{4769d16392b0476baae0c40e474fbd2a,

title = "Multi-stator LIGA fabricated electrostatic wobble motors with integrated syncronous control.",

author = "Samper, {V D} and Sangster, {A J} and Reuben, {Robert Lewis} and U Wallrabe",

year = "1998",

language = "English",

volume = "7",

pages = "214--223",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "IEEE",

}