Multi-stator LIGA fabricated electrostatic wobble motors with integrated syncronous control.

V D Samper, A J Sangster, Robert Lewis Reuben, U Wallrabe

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)214-223
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume7
Publication statusPublished - 1998

Cite this

@article{4769d16392b0476baae0c40e474fbd2a,
title = "Multi-stator LIGA fabricated electrostatic wobble motors with integrated syncronous control.",
author = "Samper, {V D} and Sangster, {A J} and Reuben, {Robert Lewis} and U Wallrabe",
year = "1998",
language = "English",
volume = "7",
pages = "214--223",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "IEEE",

}

Multi-stator LIGA fabricated electrostatic wobble motors with integrated syncronous control. / Samper, V D; Sangster, A J; Reuben, Robert Lewis; Wallrabe, U.

In: Journal of Microelectromechanical Systems, Vol. 7, 1998, p. 214-223.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Multi-stator LIGA fabricated electrostatic wobble motors with integrated syncronous control.

AU - Samper, V D

AU - Sangster, A J

AU - Reuben, Robert Lewis

AU - Wallrabe, U

PY - 1998

Y1 - 1998

M3 - Article

VL - 7

SP - 214

EP - 223

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

ER -