Multi-layer surface profiling using gated wavefront sensing

Xin Wang, Nur Dalilla Nordin, Eddy Chow Mun Tik, ChingSeong Tan, Kuew Wai Chew, Carmen Menoni

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Optics and Measurement Conference 2014
Publisher	SPIE
Volume	9442
DOIs	https://doi.org/10.1117/12.2176174
Publication status	Published - 7 Jan 2015
Event	Optics and Measurement Conference 2014 - Liberec, Czech Republic Duration: 7 Oct 2014 → 10 Oct 2014

Conference	Optics and Measurement Conference 2014
Country/Territory	Czech Republic
City	Liberec
Period	7/10/14 → 10/10/14

Access to Document

@inproceedings{d30a07e10f364ce99b81eead76053537,

title = "Multi-layer surface profiling using gated wavefront sensing",

author = "Xin Wang and Nordin, {Nur Dalilla} and Tik, {Eddy Chow Mun} and ChingSeong Tan and Chew, {Kuew Wai} and Carmen Menoni",

year = "2015",

month = jan,

day = "7",

doi = "10.1117/12.2176174",

language = "English",

volume = "9442",

series = "Proceedings of SPIE ",

publisher = "SPIE",

booktitle = "Optics and Measurement Conference 2014",

address = "United States",

note = "Optics and Measurement Conference 2014 ; Conference date: 07-10-2014 Through 10-10-2014",

}

TY - GEN

T1 - Multi-layer surface profiling using gated wavefront sensing

AU - Wang, Xin

AU - Nordin, Nur Dalilla

AU - Tik, Eddy Chow Mun

AU - Tan, ChingSeong

AU - Chew, Kuew Wai

AU - Menoni, Carmen

PY - 2015/1/7

Y1 - 2015/1/7

U2 - 10.1117/12.2176174

DO - 10.1117/12.2176174

M3 - Conference contribution

VL - 9442

T3 - Proceedings of SPIE

BT - Optics and Measurement Conference 2014

PB - SPIE

T2 - Optics and Measurement Conference 2014

Y2 - 7 October 2014 through 10 October 2014

ER -