Modelling of self-limiting laser ablation of rough surfaces: application to the polishing of diamond films

V. N. Tokarev; J. I B Wilson; M. G. Jubber; P. John; David Milne

Modelling of self-limiting laser ablation of rough surfaces: application to the polishing of diamond films

V. N. Tokarev, J. I B Wilson, M. G. Jubber, P. John, David Milne

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

68 Citations (Scopus)

Abstract

We present a theoretical model for the interaction of excimer laser radiation with rough polycrystalline CVD diamond films, showing the influence of angle of incidence, irradiation intensity and number of laser pulses. A new regime of laser treatment - self-limiting laser ablation - was found, which allows faceted films to be smoothed without wasteful ablation of the bulk. Multipulse XeCl laser (308 nm) irradiation of our diamond films, grown on silicon wafers, confirms that such polishing is accomplished. © 1995.

Original language	English
Pages (from-to)	169-176
Number of pages	8
Journal	Diamond and Related Materials
Volume	4
Issue number	3
Publication status	Published - 1 Apr 1995

Keywords

Laser irradiation
Polycrystalline diamond films
Processing - microstructure relations
Scanning electron microscopy

Cite this

@article{551bcb5c80c94c909e1df19d9d3d0ddc,

title = "Modelling of self-limiting laser ablation of rough surfaces: application to the polishing of diamond films",

abstract = "We present a theoretical model for the interaction of excimer laser radiation with rough polycrystalline CVD diamond films, showing the influence of angle of incidence, irradiation intensity and number of laser pulses. A new regime of laser treatment - self-limiting laser ablation - was found, which allows faceted films to be smoothed without wasteful ablation of the bulk. Multipulse XeCl laser (308 nm) irradiation of our diamond films, grown on silicon wafers, confirms that such polishing is accomplished. {\textcopyright} 1995.",

keywords = "Laser irradiation, Polycrystalline diamond films, Processing - microstructure relations, Scanning electron microscopy",

author = "Tokarev, {V. N.} and Wilson, {J. I B} and Jubber, {M. G.} and P. John and David Milne",

year = "1995",

month = apr,

day = "1",

language = "English",

volume = "4",

pages = "169--176",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier B.V.",

number = "3",

}

TY - JOUR

T1 - Modelling of self-limiting laser ablation of rough surfaces

T2 - application to the polishing of diamond films

AU - Tokarev, V. N.

AU - Wilson, J. I B

AU - Jubber, M. G.

AU - John, P.

AU - Milne, David

PY - 1995/4/1

Y1 - 1995/4/1

N2 - We present a theoretical model for the interaction of excimer laser radiation with rough polycrystalline CVD diamond films, showing the influence of angle of incidence, irradiation intensity and number of laser pulses. A new regime of laser treatment - self-limiting laser ablation - was found, which allows faceted films to be smoothed without wasteful ablation of the bulk. Multipulse XeCl laser (308 nm) irradiation of our diamond films, grown on silicon wafers, confirms that such polishing is accomplished. © 1995.

AB - We present a theoretical model for the interaction of excimer laser radiation with rough polycrystalline CVD diamond films, showing the influence of angle of incidence, irradiation intensity and number of laser pulses. A new regime of laser treatment - self-limiting laser ablation - was found, which allows faceted films to be smoothed without wasteful ablation of the bulk. Multipulse XeCl laser (308 nm) irradiation of our diamond films, grown on silicon wafers, confirms that such polishing is accomplished. © 1995.

KW - Laser irradiation

KW - Polycrystalline diamond films

KW - Processing - microstructure relations

KW - Scanning electron microscopy

UR - http://www.scopus.com/inward/record.url?scp=0001388324&partnerID=8YFLogxK

M3 - Article

SN - 0925-9635

VL - 4

SP - 169

EP - 176

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 3

ER -

Modelling of self-limiting laser ablation of rough surfaces: application to the polishing of diamond films

Abstract

Keywords

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