Modelling of self-limiting laser ablation of rough surfaces: application to the polishing of diamond films

V. N. Tokarev, J. I B Wilson, M. G. Jubber, P. John, David Milne

Research output: Contribution to journalArticle

Abstract

We present a theoretical model for the interaction of excimer laser radiation with rough polycrystalline CVD diamond films, showing the influence of angle of incidence, irradiation intensity and number of laser pulses. A new regime of laser treatment - self-limiting laser ablation - was found, which allows faceted films to be smoothed without wasteful ablation of the bulk. Multipulse XeCl laser (308 nm) irradiation of our diamond films, grown on silicon wafers, confirms that such polishing is accomplished. © 1995.

Original languageEnglish
Pages (from-to)169-176
Number of pages8
JournalDiamond and Related Materials
Volume4
Issue number3
Publication statusPublished - 1 Apr 1995

Keywords

  • Laser irradiation
  • Polycrystalline diamond films
  • Processing - microstructure relations
  • Scanning electron microscopy

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