Modelling MEMS structures using cosserat theory

M. Calis; O. Lagrouche; M. P Y Desmulliez

doi:10.1109/DTIP.2008.4752956

Modelling MEMS structures using cosserat theory

M. Calis, O. Lagrouche, M. P Y Desmulliez

School of Engineering & Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems. ©EDA Publishing/DTIP 2008.

Original language	English
Title of host publication	DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Pages	77-79
Number of pages	3
DOIs	https://doi.org/10.1109/DTIP.2008.4752956
Publication status	Published - 2008
Event	DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Nice, France Duration: 9 Apr 2008 → 11 Apr 2008

Conference

Conference	DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Country/Territory	France
City	Nice
Period	9/04/08 → 11/04/08

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10.1109/DTIP.2008.4752956

Cite this

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title = "Modelling MEMS structures using cosserat theory",

abstract = "Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems. {\textcopyright}EDA Publishing/DTIP 2008.",

author = "M. Calis and O. Lagrouche and Desmulliez, {M. P Y}",

year = "2008",

doi = "10.1109/DTIP.2008.4752956",

language = "English",

isbn = "9782355000065",

pages = "77--79",

booktitle = "DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS",

note = "DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS ; Conference date: 09-04-2008 Through 11-04-2008",

}

TY - GEN

T1 - Modelling MEMS structures using cosserat theory

AU - Calis, M.

AU - Lagrouche, O.

AU - Desmulliez, M. P Y

PY - 2008

Y1 - 2008

N2 - Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems. ©EDA Publishing/DTIP 2008.

AB - Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems. ©EDA Publishing/DTIP 2008.

U2 - 10.1109/DTIP.2008.4752956

DO - 10.1109/DTIP.2008.4752956

M3 - Conference contribution

SN - 9782355000065

SP - 77

EP - 79

BT - DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

T2 - DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Y2 - 9 April 2008 through 11 April 2008

ER -

Modelling MEMS structures using cosserat theory

Abstract

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