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Miniaturised optical encoder for ultra precision metrology systems

  • J. Carr
  • , M. Y P Desmulliez
  • , N. Weston
  • , D. McKendrick
  • , G. Cunningham
  • , G. McFarland
  • , W. Meredith
  • , A. McKee
  • , C. Langton

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