Abstract
A miniaturised structural health monitoring device has been developed capable of measuring the absolute distance between close parallel surfaces using Fabry-Pérot interferometry with nm-scale sensitivity. This is achieved by fabricating turning mirrors on two opposite cores of a multi-core fibre to produce a probe with dimensions limited only be the fibre diameter. Two fabrication processes have been investigated: Focused ion beam milling, which has resulted in a sensor measurement accuracy, sensitivity and range of ±0.056 µm, ±0.006 µm and ∼16000 µm respectively; and ultrafast laser assisted etching of the cleaved fibre end, where a sensor measurement accuracy, sensitivity and range of ±0.065 µm, ±0.006 µm and ∼7500 µm have been demonstrated.
Original language | English |
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Pages (from-to) | 42923-42932 |
Number of pages | 10 |
Journal | Optics Express |
Volume | 30 |
Issue number | 24 |
Early online date | 7 Nov 2022 |
DOIs | |
Publication status | Published - 21 Nov 2022 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics