Microwave plasma chemical vapour deposition of high purity diamond films

Physics & Astronomy

• diamond films 100%
• vapor deposition 70%
• microwaves 61%
• contamination 54%
• chambers 48%
• spectroscopy 48%
• phytotrons 45%
• nitrogen 44%
• base pressure 42%
• laser interferometry 39%
• hydrogen 37%
• cathodoluminescence 33%
• vacuum chambers 32%
• ultrahigh vacuum 30%
• mass spectroscopy 29%
• low concentrations 29%
• gas mixtures 29%
• light emission 28%
• methane 28%
• balls 27%
• x rays 27%
• photoelectron spectroscopy 25%
• energy dissipation 24%
• Raman spectra 23%
• decomposition 23%
• electron energy 23%
• ionization 21%
• carbon 20%
• impurities 20%
• scanning electron microscopy 19%
• silicon 16%
• diffraction 16%
• lasers 13%