Microstructure formation in a thick polymer by electrostatic-induced lithography

G Liu, W Yu, H Li, J Gao, David Flynn, Robert W Kay, Scott Cargill, Catherine Tonry, Mayur K Patel, Christopher Bailey, Marc Phillipe Yves Desmulliez

Research output: Contribution to journalArticle

Abstract

This article demonstrates the manufacturing of microstructures in a thick polymer using electrostatic-induced lithography. Unlike previous work reported elsewhere, it focuses on the fabrication of structures from meso-to micro-scale. The electrostatic-induced lithography technique is proven to work with not only dc voltage but also ac voltage. Microstructures including microchannels, sinusoidal surface profile microstructures, waveguide core, microlens array and binary Fresnel zone plate have been successfully fabricated. The aspect ratio obtained for some samples is up to 4.5:1. The whole fabrication process is fast, cost-effective in terms of the simple experimental setup and no photosensitive material is needed. This process is expected to find applications in microfluidics, photonics or micro-opto-electro-mechanical systems.

Original languageEnglish
Article number035018
Number of pages8
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number3
DOIs
Publication statusPublished - Mar 2013

Keywords

  • LINEAR-STABILITY ANALYSIS
  • LEAKY DIELECTRIC FILMS
  • ELECTRIC-FIELD
  • ELECTROHYDRODYNAMIC INSTABILITIES
  • PATTERN-FORMATION
  • LIQUID-FILM
  • INTERFACE
  • FLOW

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