Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices

G. Schiavone*, S. Smith, J. Murray, J. G. Terry, M. P. Y. Desmulliez, A. J. Walton

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

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Engineering

Material Science