Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices

G. Schiavone, S. Smith, J. Murray, J. G. Terry, M. P. Y. Desmulliez, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents the fabrication of a series of test devices designed to prove the viability of electroplated NiFe freestanding structures for use in magnetically actuated MEMS switches. Preliminary results show promising actuation responses and further release optimisation and testing will enable the quantitative measurement of the desired characteristics. In addition, this will potentially enable the mechanical characterisation of freestanding structures in other materials by means of magnetic actuation, simply by depositing small quantities of NiFe or other magnetic materials in convenient areas of existing devices.

Original languageEnglish
Title of host publication2013 IEEE International Conference on Microelectronic Test Structures (ICMTS), 25-28 March 2013, Osaka, Japan
Place of PublicationNEW YORK
PublisherIEEE
Pages13-18
Number of pages6
ISBN (Electronic)978-1-4673-4847-8
ISBN (Print)978-1-4673-4845-4
DOIs
Publication statusPublished - Aug 2013
Event8th IEEE International Conference on Microelectronic Test Structures - Osaka, Japan
Duration: 25 Mar 201328 Mar 2013

Conference

Conference8th IEEE International Conference on Microelectronic Test Structures
Abbreviated titleICMTS
CountryJapan
Period25/03/1328/03/13

Cite this

Schiavone, G., Smith, S., Murray, J., Terry, J. G., Desmulliez, M. P. Y., & Walton, A. J. (2013). Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices. In 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS), 25-28 March 2013, Osaka, Japan (pp. 13-18). IEEE. https://doi.org/10.1109/ICMTS.2013.6528138