Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices

G. Schiavone; S. Smith; J. Murray; J. G. Terry; M. P. Y. Desmulliez; A. J. Walton

doi:10.1109/ICMTS.2013.6528138

Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices

G. Schiavone^*, S. Smith, J. Murray, J. G. Terry, M. P. Y. Desmulliez, A. J. Walton

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

Abstract

This paper presents the fabrication of a series of test devices designed to prove the viability of electroplated NiFe freestanding structures for use in magnetically actuated MEMS switches. Preliminary results show promising actuation responses and further release optimisation and testing will enable the quantitative measurement of the desired characteristics. In addition, this will potentially enable the mechanical characterisation of freestanding structures in other materials by means of magnetic actuation, simply by depositing small quantities of NiFe or other magnetic materials in convenient areas of existing devices.

Original language	English
Title of host publication	2013 IEEE International Conference on Microelectronic Test Structures (ICMTS), 25-28 March 2013, Osaka, Japan
Place of Publication	NEW YORK
Publisher	IEEE
Pages	13-18
Number of pages	6
ISBN (Electronic)	978-1-4673-4847-8
ISBN (Print)	978-1-4673-4845-4
DOIs	https://doi.org/10.1109/ICMTS.2013.6528138
Publication status	Published - Aug 2013
Event	8th IEEE International Conference on Microelectronic Test Structures - Osaka, Japan Duration: 25 Mar 2013 → 28 Mar 2013

Conference

Conference	8th IEEE International Conference on Microelectronic Test Structures
Abbreviated title	ICMTS
Country/Territory	Japan
Period	25/03/13 → 28/03/13

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10.1109/ICMTS.2013.6528138

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Schiavone, G., Smith, S., Murray, J., Terry, J. G., Desmulliez, M. P. Y., & Walton, A. J. (2013). Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices. In 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS), 25-28 March 2013, Osaka, Japan (pp. 13-18). IEEE. https://doi.org/10.1109/ICMTS.2013.6528138

@inproceedings{a6387424cd4246629dce36b40c675674,

title = "Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices",

abstract = "This paper presents the fabrication of a series of test devices designed to prove the viability of electroplated NiFe freestanding structures for use in magnetically actuated MEMS switches. Preliminary results show promising actuation responses and further release optimisation and testing will enable the quantitative measurement of the desired characteristics. In addition, this will potentially enable the mechanical characterisation of freestanding structures in other materials by means of magnetic actuation, simply by depositing small quantities of NiFe or other magnetic materials in convenient areas of existing devices.",

author = "G. Schiavone and S. Smith and J. Murray and Terry, {J. G.} and Desmulliez, {M. P. Y.} and Walton, {A. J.}",

year = "2013",

month = aug,

doi = "10.1109/ICMTS.2013.6528138",

language = "English",

isbn = "978-1-4673-4845-4",

pages = "13--18",

booktitle = "2013 IEEE International Conference on Microelectronic Test Structures (ICMTS), 25-28 March 2013, Osaka, Japan",

publisher = "IEEE",

address = "United States",

note = "8th IEEE International Conference on Microelectronic Test Structures , ICMTS ; Conference date: 25-03-2013 Through 28-03-2013",

}

Schiavone, G, Smith, S, Murray, J, Terry, JG, Desmulliez, MPY & Walton, AJ 2013, Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices. in 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS), 25-28 March 2013, Osaka, Japan. IEEE, NEW YORK, pp. 13-18, 8th IEEE International Conference on Microelectronic Test Structures , Japan, 25/03/13. https://doi.org/10.1109/ICMTS.2013.6528138

Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices. / Schiavone, G.; Smith, S.; Murray, J. et al.
2013 IEEE International Conference on Microelectronic Test Structures (ICMTS), 25-28 March 2013, Osaka, Japan. NEW YORK: IEEE, 2013. p. 13-18.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices

AU - Schiavone, G.

AU - Smith, S.

AU - Murray, J.

AU - Terry, J. G.

AU - Desmulliez, M. P. Y.

AU - Walton, A. J.

PY - 2013/8

Y1 - 2013/8

N2 - This paper presents the fabrication of a series of test devices designed to prove the viability of electroplated NiFe freestanding structures for use in magnetically actuated MEMS switches. Preliminary results show promising actuation responses and further release optimisation and testing will enable the quantitative measurement of the desired characteristics. In addition, this will potentially enable the mechanical characterisation of freestanding structures in other materials by means of magnetic actuation, simply by depositing small quantities of NiFe or other magnetic materials in convenient areas of existing devices.

AB - This paper presents the fabrication of a series of test devices designed to prove the viability of electroplated NiFe freestanding structures for use in magnetically actuated MEMS switches. Preliminary results show promising actuation responses and further release optimisation and testing will enable the quantitative measurement of the desired characteristics. In addition, this will potentially enable the mechanical characterisation of freestanding structures in other materials by means of magnetic actuation, simply by depositing small quantities of NiFe or other magnetic materials in convenient areas of existing devices.

U2 - 10.1109/ICMTS.2013.6528138

DO - 10.1109/ICMTS.2013.6528138

M3 - Conference contribution

SN - 978-1-4673-4845-4

SP - 13

EP - 18

BT - 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS), 25-28 March 2013, Osaka, Japan

PB - IEEE

CY - NEW YORK

T2 - 8th IEEE International Conference on Microelectronic Test Structures

Y2 - 25 March 2013 through 28 March 2013

ER -

Schiavone G, Smith S, Murray J, Terry JG, Desmulliez MPY, Walton AJ. Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices. In 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS), 25-28 March 2013, Osaka, Japan. NEW YORK: IEEE. 2013. p. 13-18 doi: 10.1109/ICMTS.2013.6528138

Micromechanical test structures for the characterisation of electroplated NiFe cantilevers and their viability for use in MEMS switching devices

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