Micromachined interdigital filter on silicon

This article presents a microwave interdigital filter manufactured on high resistive silicon substrate. Two filter designs are referenced in this article: both filters are five pole interdigital filters with one using uniform impedance resonators and the other using stepped impedance resonators. The fabrication of the filters on silicon has been possible with the use of micromachining. This therefore enables filters to be manufactured with smaller footprints and gives rise to further development with micro-electro-mechanical systems technology. © 2006 Wiley Periodicals, Inc.