Microengineered two-dimensional arrays of monomode optical fibers

Dominik Weiland, M. P Y Desmulliez, Markus Luetzelschwab, Alexia Missoffe, Chris Beck

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this paper, a method to manufacture 2-D bundles of single-mode optical fibers of highly accurate pitch is presented. Electrostatic actuation of the metal-clad optical fibers is performed to align the fibers with submicrometer translational alignment accuracy. The manufacturing and alignment performance characteristics of the fiber holder are fully described. The sensitivity of the active-alignment procedure for a maximum displacement up to 90 µmbetween 0.125 and 1.1µm/V, depending on the clamping distance. An alignment accuracy of around 0.2 µm can be achieved with this alignment method. The combination of the electrostatic actuation with the optical monitoring of the fiber pitch in a closed-loop feedback system provides a highly accurate and sensitive alignment system. © 2007 IEEE.

Original languageEnglish
Pages (from-to)1506-1514
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume16
Issue number6
DOIs
Publication statusPublished - Dec 2007

Keywords

  • Microassembly
  • Microelectromechanical devices
  • Optical coupling
  • Optical fiber couplers
  • Packaging

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