Microactuators of free-standing TiNiCu films

Y. Q. Fu; J. K. Luo; A. J. Flewitt; S. E. Ong; S. Zhang; H. J. Du; W. I. Milne

doi:10.1088/0964-1726/16/6/070

Microactuators of free-standing TiNiCu films

Y. Q. Fu, J. K. Luo, A. J. Flewitt, S. E. Ong, S. Zhang, H. J. Du, W. I. Milne

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

44 Citations (Scopus)

Abstract

Ti₅₀Ni₄₇Cu₃ films were prepared using magnetron sputtering deposition, and their martensitic transformation and mechanical properties were characterized. Free-standing TiNiCu films showed an intrinsic two-way shape memory effect which is attributed to a composition gradient through the film thickness. Different types of TiNiCu microactuators, including microtweezers and microcages, have been successfully fabricated which employ this two-way shape memory effect for operation. Upon heating/cooling, the microtweezers showed both horizontal and vertical displacement due to combined shape memory and thermal effects. The microcage actuators could be opened/closed through substrate heating with a maximum temperature of 90 °C, or by electrical heating with a power less than 5 mW and a maximum frequency of 100-300 Hz. Issues related to the fabrication and applications, such as stability and beam bending after release, have been addressed. © IOP Publishing Ltd.

Original language	English
Pages (from-to)	2651-2657
Number of pages	7
Journal	Smart Materials and Structures
Volume	16
Issue number	6
DOIs	https://doi.org/10.1088/0964-1726/16/6/070
Publication status	Published - 1 Dec 2007

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title = "Microactuators of free-standing TiNiCu films",

abstract = "Ti50Ni47Cu3 films were prepared using magnetron sputtering deposition, and their martensitic transformation and mechanical properties were characterized. Free-standing TiNiCu films showed an intrinsic two-way shape memory effect which is attributed to a composition gradient through the film thickness. Different types of TiNiCu microactuators, including microtweezers and microcages, have been successfully fabricated which employ this two-way shape memory effect for operation. Upon heating/cooling, the microtweezers showed both horizontal and vertical displacement due to combined shape memory and thermal effects. The microcage actuators could be opened/closed through substrate heating with a maximum temperature of 90 °C, or by electrical heating with a power less than 5 mW and a maximum frequency of 100-300 Hz. Issues related to the fabrication and applications, such as stability and beam bending after release, have been addressed. {\textcopyright} IOP Publishing Ltd.",

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AU - Fu, Y. Q.

AU - Luo, J. K.

AU - Flewitt, A. J.

AU - Ong, S. E.

AU - Zhang, S.

AU - Du, H. J.

AU - Milne, W. I.

PY - 2007/12/1

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N2 - Ti50Ni47Cu3 films were prepared using magnetron sputtering deposition, and their martensitic transformation and mechanical properties were characterized. Free-standing TiNiCu films showed an intrinsic two-way shape memory effect which is attributed to a composition gradient through the film thickness. Different types of TiNiCu microactuators, including microtweezers and microcages, have been successfully fabricated which employ this two-way shape memory effect for operation. Upon heating/cooling, the microtweezers showed both horizontal and vertical displacement due to combined shape memory and thermal effects. The microcage actuators could be opened/closed through substrate heating with a maximum temperature of 90 °C, or by electrical heating with a power less than 5 mW and a maximum frequency of 100-300 Hz. Issues related to the fabrication and applications, such as stability and beam bending after release, have been addressed. © IOP Publishing Ltd.

AB - Ti50Ni47Cu3 films were prepared using magnetron sputtering deposition, and their martensitic transformation and mechanical properties were characterized. Free-standing TiNiCu films showed an intrinsic two-way shape memory effect which is attributed to a composition gradient through the film thickness. Different types of TiNiCu microactuators, including microtweezers and microcages, have been successfully fabricated which employ this two-way shape memory effect for operation. Upon heating/cooling, the microtweezers showed both horizontal and vertical displacement due to combined shape memory and thermal effects. The microcage actuators could be opened/closed through substrate heating with a maximum temperature of 90 °C, or by electrical heating with a power less than 5 mW and a maximum frequency of 100-300 Hz. Issues related to the fabrication and applications, such as stability and beam bending after release, have been addressed. © IOP Publishing Ltd.

U2 - 10.1088/0964-1726/16/6/070

DO - 10.1088/0964-1726/16/6/070

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EP - 2657

JO - Smart Materials and Structures

JF - Smart Materials and Structures

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ER -

Microactuators of free-standing TiNiCu films

Abstract

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