Microactuators of free-standing TiNiCu films

Y. Q. Fu, J. K. Luo, A. J. Flewitt, S. E. Ong, S. Zhang, H. J. Du, W. I. Milne

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33 Citations (Scopus)

Abstract

Ti50Ni47Cu3 films were prepared using magnetron sputtering deposition, and their martensitic transformation and mechanical properties were characterized. Free-standing TiNiCu films showed an intrinsic two-way shape memory effect which is attributed to a composition gradient through the film thickness. Different types of TiNiCu microactuators, including microtweezers and microcages, have been successfully fabricated which employ this two-way shape memory effect for operation. Upon heating/cooling, the microtweezers showed both horizontal and vertical displacement due to combined shape memory and thermal effects. The microcage actuators could be opened/closed through substrate heating with a maximum temperature of 90 °C, or by electrical heating with a power less than 5 mW and a maximum frequency of 100-300 Hz. Issues related to the fabrication and applications, such as stability and beam bending after release, have been addressed. © IOP Publishing Ltd.

Original languageEnglish
Pages (from-to)2651-2657
Number of pages7
JournalSmart Materials and Structures
Volume16
Issue number6
DOIs
Publication statusPublished - 1 Dec 2007

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    Fu, Y. Q., Luo, J. K., Flewitt, A. J., Ong, S. E., Zhang, S., Du, H. J., & Milne, W. I. (2007). Microactuators of free-standing TiNiCu films. Smart Materials and Structures, 16(6), 2651-2657. https://doi.org/10.1088/0964-1726/16/6/070