Micro-machining of in-fibre 45° mirror optical fibre cantilever for dual-axis acceleration measurement

Jun Li*, Jia Wei Li, Jia Rui Zhang, Kuo Li, Tian Ma, Wei Feng Wang, Xiao Wei Zhai, William N. MacPherson, Robert R. J. Maier, Duncan P. Hand

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Abstract

Focused ion beam (FIB) machining has been demonstrated to be capable of fabricating nano- and micro-scale structures. In this paper we demonstrate techniques to design and fabricate 45° micro-mirrors into the end of multi-core fibres using FIB processing. The mirrors are fabricated by a two-step process: a scanning process which is used to make a rough cut followed by a polishing process to create an optical surface finish mirror. The machined 45° mirrors can be accurately aligned with optical fibre cores, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept demonstration shows that the fabricated structure is capable of measuring two-axis acceleration interferometrically with a linear response from 0.2 to 4 g and an rms. error of 0.03 g. Acceleration measurements of frequency response up to 700 Hz and cross-sensitivity of ∼4.3% are demonstrated.

Original languageEnglish
Article number045105
JournalMeasurement Science and Technology
Volume34
Issue number4
Early online date17 Jan 2023
DOIs
Publication statusPublished - Apr 2023

Keywords

  • acceleration measurement
  • focused ion beam
  • in-fibre 45° mirror
  • micro-machining
  • multi-core fibre

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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