Micro-machined optical fiber side-cantilevers for acceleration measurement

J. Li, G. Y. Wang, Jining Sun, Robert Raimund Josef Maier, W. N. MacPherson, Duncan Paul Hand, F. Z. Dong

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)


We propose an accelerometer based on a micro-cantilever fabricated onto the side of a single mode optical fiber using a combination of ps-laser machining and Focused Ion Beam (FIB) processing. FIB machining is also used to fabricate a 45° mirror onto the end of the fiber that is accurately aligned with optical fiber core. This provides a reliable means to optically address components attached to the side of the fiber, such as the cantilever. Using interferometry to accurately monitor the deflection of the side cantilever results in a device that is capable of measuring two-axis acceleration. Acceleration up to 6g is measured with a resolution of ~0.01g and a frequency range from DC to 500Hz has been demonstrated. The cross-axis sensitivity is below -32dB.

Original languageEnglish
Pages (from-to)1836-1839
Number of pages4
JournalIEEE Photonics Technology Letters
Issue number21
Early online date18 Sept 2017
Publication statusPublished - 1 Nov 2017


  • Acceleration
  • Accelerometers
  • Fabry-Perot
  • Fiber optics sensors
  • Optical fabrication
  • Optical fiber sensors
  • Optical fibers
  • Sensitivity

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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