Micro-machined optical fiber side-cantilevers for acceleration measurement

J. Li; G. Y. Wang; Jining Sun; Robert Raimund Josef Maier; W. N. MacPherson; Duncan Paul Hand; F. Z. Dong

doi:10.1109/LPT.2017.2753279

Micro-machined optical fiber side-cantilevers for acceleration measurement

J. Li, G. Y. Wang, Jining Sun, Robert Raimund Josef Maier, W. N. MacPherson, Duncan Paul Hand, F. Z. Dong

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

We propose an accelerometer based on a micro-cantilever fabricated onto the side of a single mode optical fiber using a combination of ps-laser machining and Focused Ion Beam (FIB) processing. FIB machining is also used to fabricate a 45° mirror onto the end of the fiber that is accurately aligned with optical fiber core. This provides a reliable means to optically address components attached to the side of the fiber, such as the cantilever. Using interferometry to accurately monitor the deflection of the side cantilever results in a device that is capable of measuring two-axis acceleration. Acceleration up to 6g is measured with a resolution of ~0.01g and a frequency range from DC to 500Hz has been demonstrated. The cross-axis sensitivity is below -32dB.

Original language	English
Pages (from-to)	1836-1839
Number of pages	4
Journal	IEEE Photonics Technology Letters
Volume	29
Issue number	21
Early online date	18 Sept 2017
DOIs	https://doi.org/10.1109/LPT.2017.2753279
Publication status	Published - 1 Nov 2017

Keywords

Acceleration
Accelerometers
Fabry-Perot
Fiber optics sensors
Optical fabrication
Optical fiber sensors
Optical fibers
Sensitivity

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1109/LPT.2017.2753279

Cite this

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abstract = "We propose an accelerometer based on a micro-cantilever fabricated onto the side of a single mode optical fiber using a combination of ps-laser machining and Focused Ion Beam (FIB) processing. FIB machining is also used to fabricate a 45° mirror onto the end of the fiber that is accurately aligned with optical fiber core. This provides a reliable means to optically address components attached to the side of the fiber, such as the cantilever. Using interferometry to accurately monitor the deflection of the side cantilever results in a device that is capable of measuring two-axis acceleration. Acceleration up to 6g is measured with a resolution of ~0.01g and a frequency range from DC to 500Hz has been demonstrated. The cross-axis sensitivity is below -32dB.",

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AU - Maier, Robert Raimund Josef

AU - MacPherson, W. N.

AU - Hand, Duncan Paul

AU - Dong, F. Z.

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N2 - We propose an accelerometer based on a micro-cantilever fabricated onto the side of a single mode optical fiber using a combination of ps-laser machining and Focused Ion Beam (FIB) processing. FIB machining is also used to fabricate a 45° mirror onto the end of the fiber that is accurately aligned with optical fiber core. This provides a reliable means to optically address components attached to the side of the fiber, such as the cantilever. Using interferometry to accurately monitor the deflection of the side cantilever results in a device that is capable of measuring two-axis acceleration. Acceleration up to 6g is measured with a resolution of ~0.01g and a frequency range from DC to 500Hz has been demonstrated. The cross-axis sensitivity is below -32dB.

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KW - Accelerometers

KW - Fabry-Perot

KW - Fiber optics sensors

KW - Optical fabrication

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KW - Sensitivity

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Micro-machined optical fiber side-cantilevers for acceleration measurement

Abstract

Keywords

ASJC Scopus subject areas

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