This paper presents a novel technology to pattern polymer material deposited onto 2D and 3D surfaces at the micro- and mesoscopic scales. Electro-hydrodynamic instability patterning (EHDIP) relies on the formation of features induced by electrostatic pressure. Unlike previous work reported elsewhere in nano-patterning, we focused on the fabrication of structures from the micro- to the meso-scale. The electrostatic induced lithography technique is proven to work with not only DC voltage but also AC voltage at frequency up to 1 KHz. Besides planar substrates, patterning is carried out on 3D surfaces like the inner surface of a half hollow cylinder, which is extremely difficult by traditional photolithography methods. The whole fabrication process is found to be fast,cost-effective and no photosensitive material is needed as in traditional photolithography. Applications of this technology include microfluidics, MEMS and wafer bumping. ©2008 IEEE.
|Title of host publication||Proceedings - 2008 2nd Electronics Systemintegration Technology Conference, ESTC|
|Number of pages||6|
|Publication status||Published - 2008|
|Event||2008 2nd Electronics Systemintegration Technology Conference - Greenwich, United Kingdom|
Duration: 1 Sep 2008 → 4 Sep 2008
|Conference||2008 2nd Electronics Systemintegration Technology Conference|
|Period||1/09/08 → 4/09/08|