Micro-fabrication on 3-D surface by electrostatic induced lithography

W. Yu, S. Cargill, M. Leonard, M. P Y Desmulliez

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper presents a novel technology to pattern polymer material deposited onto 2D and 3D surfaces at the micro- and mesoscopic scales. Electro-hydrodynamic instability patterning (EHDIP) relies on the formation of features induced by electrostatic pressure. Unlike previous work reported elsewhere in nano-patterning, we focused on the fabrication of structures from the micro- to the meso-scale. The electrostatic induced lithography technique is proven to work with not only DC voltage but also AC voltage at frequency up to 1 KHz. Besides planar substrates, patterning is carried out on 3D surfaces like the inner surface of a half hollow cylinder, which is extremely difficult by traditional photolithography methods. The whole fabrication process is found to be fast,cost-effective and no photosensitive material is needed as in traditional photolithography. Applications of this technology include microfluidics, MEMS and wafer bumping. ©2008 IEEE.

Original languageEnglish
Title of host publicationProceedings - 2008 2nd Electronics Systemintegration Technology Conference, ESTC
Pages111-116
Number of pages6
DOIs
Publication statusPublished - 2008
Event2008 2nd Electronics Systemintegration Technology Conference - Greenwich, United Kingdom
Duration: 1 Sep 20084 Sep 2008

Conference

Conference2008 2nd Electronics Systemintegration Technology Conference
Abbreviated titleESTC
CountryUnited Kingdom
CityGreenwich
Period1/09/084/09/08

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