MEMS three-axis accelerometer: Design, fabrication and application of measuring heart wall motion

Craig Lowrie; M. P Y Desmulliez; Lars Hoff; Ole Jakob Elle; Erik Fosse

MEMS three-axis accelerometer: Design, fabrication and application of measuring heart wall motion

Craig Lowrie
, M. P Y Desmulliez
, Lars Hoff
, Ole Jakob Elle
, Erik Fosse

School of Engineering & Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

This paper presents the design, simulation and fabrication of a SOI micromachined three-axis accelerometer. The sensor is to be implanted inside the body of a patient who has just undergone coronary artery bypass surgery. Sutured in place to the outer wall of the heart, the sensor is to detect postsurgical risks such as regional cardiac ischemia. Feasibility studies of using this type of sensor on animals have proven this monitoring technology using large commercially available sensors. This project is to design and fabricate a three-axis accelerometer that better meets the size requirements. Sensing of acceleration is made possible using the piezoresistive effect. ©EDA Publishing/DTIP 2009.

Original language	English
Title of host publication	2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009
Pages	229-234
Number of pages	6
Publication status	Published - 2009
Event	2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Rome, Italy Duration: 1 Apr 2009 → 3 Apr 2009

Conference

Conference	2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Abbreviated title	MEMS/MOEMS 2009
Country/Territory	Italy
City	Rome
Period	1/04/09 → 3/04/09

Cite this

@inproceedings{03aa6d85fc684d6cbe696010d3a98c25,

title = "MEMS three-axis accelerometer: Design, fabrication and application of measuring heart wall motion",

abstract = "This paper presents the design, simulation and fabrication of a SOI micromachined three-axis accelerometer. The sensor is to be implanted inside the body of a patient who has just undergone coronary artery bypass surgery. Sutured in place to the outer wall of the heart, the sensor is to detect postsurgical risks such as regional cardiac ischemia. Feasibility studies of using this type of sensor on animals have proven this monitoring technology using large commercially available sensors. This project is to design and fabricate a three-axis accelerometer that better meets the size requirements. Sensing of acceleration is made possible using the piezoresistive effect. {\textcopyright}EDA Publishing/DTIP 2009.",

author = "Craig Lowrie and Desmulliez, \{M. P Y\} and Lars Hoff and Elle, \{Ole Jakob\} and Erik Fosse",

year = "2009",

language = "English",

isbn = "9782355000096",

pages = "229--234",

booktitle = "2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009",

note = "2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009 ; Conference date: 01-04-2009 Through 03-04-2009",

}

TY - GEN

T1 - MEMS three-axis accelerometer

T2 - 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

AU - Lowrie, Craig

AU - Desmulliez, M. P Y

AU - Hoff, Lars

AU - Elle, Ole Jakob

AU - Fosse, Erik

PY - 2009

Y1 - 2009

N2 - This paper presents the design, simulation and fabrication of a SOI micromachined three-axis accelerometer. The sensor is to be implanted inside the body of a patient who has just undergone coronary artery bypass surgery. Sutured in place to the outer wall of the heart, the sensor is to detect postsurgical risks such as regional cardiac ischemia. Feasibility studies of using this type of sensor on animals have proven this monitoring technology using large commercially available sensors. This project is to design and fabricate a three-axis accelerometer that better meets the size requirements. Sensing of acceleration is made possible using the piezoresistive effect. ©EDA Publishing/DTIP 2009.

AB - This paper presents the design, simulation and fabrication of a SOI micromachined three-axis accelerometer. The sensor is to be implanted inside the body of a patient who has just undergone coronary artery bypass surgery. Sutured in place to the outer wall of the heart, the sensor is to detect postsurgical risks such as regional cardiac ischemia. Feasibility studies of using this type of sensor on animals have proven this monitoring technology using large commercially available sensors. This project is to design and fabricate a three-axis accelerometer that better meets the size requirements. Sensing of acceleration is made possible using the piezoresistive effect. ©EDA Publishing/DTIP 2009.

UR - https://www.scopus.com/pages/publications/70349227099

M3 - Conference contribution

SN - 9782355000096

SP - 229

EP - 234

BT - 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009

Y2 - 1 April 2009 through 3 April 2009

ER -

MEMS three-axis accelerometer: Design, fabrication and application of measuring heart wall motion

Abstract

Conference

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