MEMS three-axis accelerometer

Design, fabrication and application of measuring heart wall motion

Craig Lowrie, M. P Y Desmulliez, Lars Hoff, Ole Jakob Elle, Erik Fosse

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the design, simulation and fabrication of a SOI micromachined three-axis accelerometer. The sensor is to be implanted inside the body of a patient who has just undergone coronary artery bypass surgery. Sutured in place to the outer wall of the heart, the sensor is to detect postsurgical risks such as regional cardiac ischemia. Feasibility studies of using this type of sensor on animals have proven this monitoring technology using large commercially available sensors. This project is to design and fabricate a three-axis accelerometer that better meets the size requirements. Sensing of acceleration is made possible using the piezoresistive effect. ©EDA Publishing/DTIP 2009.

Original languageEnglish
Title of host publication2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009
Pages229-234
Number of pages6
Publication statusPublished - 2009
Event2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Rome, Italy
Duration: 1 Apr 20093 Apr 2009

Conference

Conference2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Abbreviated titleMEMS/MOEMS 2009
CountryItaly
CityRome
Period1/04/093/04/09

Fingerprint

Accelerometers
MEMS
Fabrication
Sensors
Surgery
Animals
Monitoring

Cite this

Lowrie, C., Desmulliez, M. P. Y., Hoff, L., Elle, O. J., & Fosse, E. (2009). MEMS three-axis accelerometer: Design, fabrication and application of measuring heart wall motion. In 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009 (pp. 229-234)
Lowrie, Craig ; Desmulliez, M. P Y ; Hoff, Lars ; Elle, Ole Jakob ; Fosse, Erik. / MEMS three-axis accelerometer : Design, fabrication and application of measuring heart wall motion. 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009. 2009. pp. 229-234
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abstract = "This paper presents the design, simulation and fabrication of a SOI micromachined three-axis accelerometer. The sensor is to be implanted inside the body of a patient who has just undergone coronary artery bypass surgery. Sutured in place to the outer wall of the heart, the sensor is to detect postsurgical risks such as regional cardiac ischemia. Feasibility studies of using this type of sensor on animals have proven this monitoring technology using large commercially available sensors. This project is to design and fabricate a three-axis accelerometer that better meets the size requirements. Sensing of acceleration is made possible using the piezoresistive effect. {\circledC}EDA Publishing/DTIP 2009.",
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Lowrie, C, Desmulliez, MPY, Hoff, L, Elle, OJ & Fosse, E 2009, MEMS three-axis accelerometer: Design, fabrication and application of measuring heart wall motion. in 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009. pp. 229-234, 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Rome, Italy, 1/04/09.

MEMS three-axis accelerometer : Design, fabrication and application of measuring heart wall motion. / Lowrie, Craig; Desmulliez, M. P Y; Hoff, Lars; Elle, Ole Jakob; Fosse, Erik.

2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009. 2009. p. 229-234.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Lowrie C, Desmulliez MPY, Hoff L, Elle OJ, Fosse E. MEMS three-axis accelerometer: Design, fabrication and application of measuring heart wall motion. In 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009. 2009. p. 229-234