Abstract
This paper presents the design, simulation and fabrication of a SOI micromachined three-axis accelerometer. The sensor is to be implanted inside the body of a patient who has just undergone coronary artery bypass surgery. Sutured in place to the outer wall of the heart, the sensor is to detect postsurgical risks such as regional cardiac ischemia. Feasibility studies of using this type of sensor on animals have proven this monitoring technology using large commercially available sensors. This project is to design and fabricate a three-axis accelerometer that better meets the size requirements. Sensing of acceleration is made possible using the piezoresistive effect. ©EDA Publishing/DTIP 2009.
| Original language | English |
|---|---|
| Title of host publication | 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009 |
| Pages | 229-234 |
| Number of pages | 6 |
| Publication status | Published - 2009 |
| Event | 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Rome, Italy Duration: 1 Apr 2009 → 3 Apr 2009 |
Conference
| Conference | 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS |
|---|---|
| Abbreviated title | MEMS/MOEMS 2009 |
| Country/Territory | Italy |
| City | Rome |
| Period | 1/04/09 → 3/04/09 |