MEMS reliability modelling methodology: Application to wobble micromotor failure analysis

S. Muratet; J. Y. Fourniols; G. Soto-Romero; A. Endemaño; A. Marty; M. Desmulliez

doi:10.1016/S0026-2714(03)00330-5

MEMS reliability modelling methodology: Application to wobble micromotor failure analysis

S. Muratet, J. Y. Fourniols, G. Soto-Romero, A. Endemaño, A. Marty, M. Desmulliez

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Even if it is clear that MEMS are an emergence of microelectronic technologies, taking advantage of the mechanical properties of silicon and silicon compound materials, their heterogeneous and complex nature, the new approach in their packaging and interconnections, modify deeply the way to check the level of confidence in their working conditions. The purpose of this paper is therefore to present a methodology for the reliability study of MEMS through the development of a virtual prototyping taking account of failure mechanisms, with VHDL-AMS language. This approach based on a behavioral MEMS modeling in working conditions combined with failure mechanisms injection is illustrated through Wobble electrostatic motors. © 2003 Elsevier Ltd. All rights reserved.

Original language	English
Pages (from-to)	1945-1949
Number of pages	5
Journal	Microelectronics Reliability
Volume	43
Issue number	9-11
DOIs	https://doi.org/10.1016/S0026-2714(03)00330-5
Publication status	Published - Sept 2003
Event	14th European Symposium on Reliability of Electron Devices - Bordeaux, France, France Duration: 7 Oct 2003 → 10 Oct 2003

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10.1016/S0026-2714(03)00330-5

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title = "MEMS reliability modelling methodology: Application to wobble micromotor failure analysis",

abstract = "Even if it is clear that MEMS are an emergence of microelectronic technologies, taking advantage of the mechanical properties of silicon and silicon compound materials, their heterogeneous and complex nature, the new approach in their packaging and interconnections, modify deeply the way to check the level of confidence in their working conditions. The purpose of this paper is therefore to present a methodology for the reliability study of MEMS through the development of a virtual prototyping taking account of failure mechanisms, with VHDL-AMS language. This approach based on a behavioral MEMS modeling in working conditions combined with failure mechanisms injection is illustrated through Wobble electrostatic motors. {\textcopyright} 2003 Elsevier Ltd. All rights reserved.",

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AU - Muratet, S.

AU - Fourniols, J. Y.

AU - Soto-Romero, G.

AU - Endemaño, A.

AU - Marty, A.

AU - Desmulliez, M.

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AB - Even if it is clear that MEMS are an emergence of microelectronic technologies, taking advantage of the mechanical properties of silicon and silicon compound materials, their heterogeneous and complex nature, the new approach in their packaging and interconnections, modify deeply the way to check the level of confidence in their working conditions. The purpose of this paper is therefore to present a methodology for the reliability study of MEMS through the development of a virtual prototyping taking account of failure mechanisms, with VHDL-AMS language. This approach based on a behavioral MEMS modeling in working conditions combined with failure mechanisms injection is illustrated through Wobble electrostatic motors. © 2003 Elsevier Ltd. All rights reserved.

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JO - Microelectronics Reliability

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IS - 9-11

Y2 - 7 October 2003 through 10 October 2003

ER -

MEMS reliability modelling methodology: Application to wobble micromotor failure analysis

Abstract

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