MEMS reliability modelling methodology: Application to wobble micromotor failure analysis

S. Muratet, J. Y. Fourniols, G. Soto-Romero, A. Endemaño, A. Marty, M. Desmulliez

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


Even if it is clear that MEMS are an emergence of microelectronic technologies, taking advantage of the mechanical properties of silicon and silicon compound materials, their heterogeneous and complex nature, the new approach in their packaging and interconnections, modify deeply the way to check the level of confidence in their working conditions. The purpose of this paper is therefore to present a methodology for the reliability study of MEMS through the development of a virtual prototyping taking account of failure mechanisms, with VHDL-AMS language. This approach based on a behavioral MEMS modeling in working conditions combined with failure mechanisms injection is illustrated through Wobble electrostatic motors. © 2003 Elsevier Ltd. All rights reserved.

Original languageEnglish
Pages (from-to)1945-1949
Number of pages5
JournalMicroelectronics Reliability
Issue number9-11
Publication statusPublished - Sept 2003
Event14th European Symposium on Reliability of Electron Devices - Bordeaux, France, France
Duration: 7 Oct 200310 Oct 2003


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