Megasonic agitation for enhanced electrodeposition of copper

Physics

• Acoustic Streaming 66%
• Acoustic Wave 33%
• Agitation 100%
• Copper 33%
• Deposits 33%
• Electrodeposition 33%
• Electroplating 33%
• Frequencies 33%
• Hydrodynamics 33%
• Metal 33%
• Physics 33%
• Utilization 66%

Engineering

• Applications 66%
• Computer Simulation 33%
• Demonstrates 33%
• Diffusion Layer 33%
• High Aspect Ratio 33%
• Limitations 33%
• Metallizations 33%
• Microvias 66%
• Pitch 33%
• Plating Rate 33%
• Reduction 33%
• Thickness 33%