@inproceedings{3d6ac64517434c5aba21b0eb4e777cd3,
title = "Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation",
abstract = "This paper reports a nanoscopic mechanosynthesis of three-dimensional (3D) nanostructures by nanolithography-based molecular manipulation (NMM) of target molecules for the applications requiring both physical and chemical anisotropies. The reported molecular manipulators with nanometer-sized patterns and anisotropic surface functionalities are fabricated by exploiting the hybrid nanometer-scale NMM process. They are then utilized for positional nanoassembly of molecules followed by mechanosynthesis producing 3D nanoreplicas. This approach offers {"}top-down{"} design and fabrication of morphological features of nanoparticles (NPs). Three types of replicated sub-10nm polystyrene (PS) nanostructures have been successfully demonstrated in this work, namely, {"}nanomushrooms{"}, {"}nanospikes{"}, and high-aspect-ratio {"}nanofibers{"}.",
keywords = "PARTICLES",
author = "Zhan Liu and Nisarga Naik and Bucknall, \{David G.\} and Allen, \{Mark G.\}",
year = "2010",
doi = "10.1109/MEMSYS.2010.5442469",
language = "English",
isbn = "978-1-4244-5761-8 ",
series = "Proceedings: IEEE Micro Electro Mechanical Systems",
publisher = "IEEE",
pages = "452--455",
booktitle = "2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)",
address = "United States",
note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",
}