Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation

Zhan Liu; Nisarga Naik; David G. Bucknall; Mark G. Allen

doi:10.1109/MEMSYS.2010.5442469

Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation

Zhan Liu^*, Nisarga Naik, David G. Bucknall, Mark G. Allen

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

This paper reports a nanoscopic mechanosynthesis of three-dimensional (3D) nanostructures by nanolithography-based molecular manipulation (NMM) of target molecules for the applications requiring both physical and chemical anisotropies. The reported molecular manipulators with nanometer-sized patterns and anisotropic surface functionalities are fabricated by exploiting the hybrid nanometer-scale NMM process. They are then utilized for positional nanoassembly of molecules followed by mechanosynthesis producing 3D nanoreplicas. This approach offers "top-down" design and fabrication of morphological features of nanoparticles (NPs). Three types of replicated sub-10nm polystyrene (PS) nanostructures have been successfully demonstrated in this work, namely, "nanomushrooms", "nanospikes", and high-aspect-ratio "nanofibers".

Original language	English
Title of host publication	2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Publication	New York
Publisher	IEEE
Pages	452-455
Number of pages	4
ISBN (Electronic)	978-1-4244-5763-2
ISBN (Print)	978-1-4244-5761-8
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442469
Publication status	Published - 2010
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems - Hong Kong, United Kingdom Duration: 24 Jan 2010 → 28 Jan 2010

Publication series

Name	Proceedings: IEEE Micro Electro Mechanical Systems
Publisher	IEEE
ISSN (Print)	1084-6999

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems
Abbreviated title	MEMS 2010
Country/Territory	United Kingdom
Period	24/01/10 → 28/01/10

Keywords

PARTICLES

Access to Document

10.1109/MEMSYS.2010.5442469

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Cite this

Liu, Z., Naik, N., Bucknall, D. G., & Allen, M. G. (2010). Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation. In 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 452-455). [5442469] (Proceedings: IEEE Micro Electro Mechanical Systems). IEEE. https://doi.org/10.1109/MEMSYS.2010.5442469

@inproceedings{3d6ac64517434c5aba21b0eb4e777cd3,

title = "Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation",

abstract = "This paper reports a nanoscopic mechanosynthesis of three-dimensional (3D) nanostructures by nanolithography-based molecular manipulation (NMM) of target molecules for the applications requiring both physical and chemical anisotropies. The reported molecular manipulators with nanometer-sized patterns and anisotropic surface functionalities are fabricated by exploiting the hybrid nanometer-scale NMM process. They are then utilized for positional nanoassembly of molecules followed by mechanosynthesis producing 3D nanoreplicas. This approach offers {"}top-down{"} design and fabrication of morphological features of nanoparticles (NPs). Three types of replicated sub-10nm polystyrene (PS) nanostructures have been successfully demonstrated in this work, namely, {"}nanomushrooms{"}, {"}nanospikes{"}, and high-aspect-ratio {"}nanofibers{"}.",

keywords = "PARTICLES",

author = "Zhan Liu and Nisarga Naik and Bucknall, {David G.} and Allen, {Mark G.}",

year = "2010",

doi = "10.1109/MEMSYS.2010.5442469",

language = "English",

isbn = "978-1-4244-5761-8 ",

series = "Proceedings: IEEE Micro Electro Mechanical Systems",

publisher = "IEEE",

pages = "452--455",

booktitle = "2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)",

address = "United States",

note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

}

Liu, Z, Naik, N, Bucknall, DG & Allen, MG 2010, Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation. in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)., 5442469, Proceedings: IEEE Micro Electro Mechanical Systems, IEEE, New York, pp. 452-455, 23rd IEEE International Conference on Micro Electro Mechanical Systems, United Kingdom, 24/01/10. https://doi.org/10.1109/MEMSYS.2010.5442469

Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation. / Liu, Zhan; Naik, Nisarga; Bucknall, David G. et al.

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS). New York : IEEE, 2010. p. 452-455 5442469 (Proceedings: IEEE Micro Electro Mechanical Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation

AU - Liu, Zhan

AU - Naik, Nisarga

AU - Bucknall, David G.

AU - Allen, Mark G.

PY - 2010

Y1 - 2010

N2 - This paper reports a nanoscopic mechanosynthesis of three-dimensional (3D) nanostructures by nanolithography-based molecular manipulation (NMM) of target molecules for the applications requiring both physical and chemical anisotropies. The reported molecular manipulators with nanometer-sized patterns and anisotropic surface functionalities are fabricated by exploiting the hybrid nanometer-scale NMM process. They are then utilized for positional nanoassembly of molecules followed by mechanosynthesis producing 3D nanoreplicas. This approach offers "top-down" design and fabrication of morphological features of nanoparticles (NPs). Three types of replicated sub-10nm polystyrene (PS) nanostructures have been successfully demonstrated in this work, namely, "nanomushrooms", "nanospikes", and high-aspect-ratio "nanofibers".

AB - This paper reports a nanoscopic mechanosynthesis of three-dimensional (3D) nanostructures by nanolithography-based molecular manipulation (NMM) of target molecules for the applications requiring both physical and chemical anisotropies. The reported molecular manipulators with nanometer-sized patterns and anisotropic surface functionalities are fabricated by exploiting the hybrid nanometer-scale NMM process. They are then utilized for positional nanoassembly of molecules followed by mechanosynthesis producing 3D nanoreplicas. This approach offers "top-down" design and fabrication of morphological features of nanoparticles (NPs). Three types of replicated sub-10nm polystyrene (PS) nanostructures have been successfully demonstrated in this work, namely, "nanomushrooms", "nanospikes", and high-aspect-ratio "nanofibers".

KW - PARTICLES

U2 - 10.1109/MEMSYS.2010.5442469

DO - 10.1109/MEMSYS.2010.5442469

M3 - Conference contribution

SN - 978-1-4244-5761-8

T3 - Proceedings: IEEE Micro Electro Mechanical Systems

SP - 452

EP - 455

BT - 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - New York

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 24 January 2010 through 28 January 2010

ER -

Liu Z, Naik N, Bucknall DG, Allen MG. Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation. In 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS). New York: IEEE. 2010. p. 452-455. 5442469. (Proceedings: IEEE Micro Electro Mechanical Systems). https://doi.org/10.1109/MEMSYS.2010.5442469

Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation

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