Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation

Zhan Liu, Nisarga Naik, David G. Bucknall, Mark G. Allen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper reports a nanoscopic mechanosynthesis of three-dimensional (3D) nanostructures by nanolithography-based molecular manipulation (NMM) of target molecules for the applications requiring both physical and chemical anisotropies. The reported molecular manipulators with nanometer-sized patterns and anisotropic surface functionalities are fabricated by exploiting the hybrid nanometer-scale NMM process. They are then utilized for positional nanoassembly of molecules followed by mechanosynthesis producing 3D nanoreplicas. This approach offers "top-down" design and fabrication of morphological features of nanoparticles (NPs). Three types of replicated sub-10nm polystyrene (PS) nanostructures have been successfully demonstrated in this work, namely, "nanomushrooms", "nanospikes", and high-aspect-ratio "nanofibers".

Original languageEnglish
Title of host publication2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Place of PublicationNew York
PublisherIEEE
Pages452-455
Number of pages4
ISBN (Electronic)978-1-4244-5763-2
ISBN (Print)978-1-4244-5761-8
DOIs
Publication statusPublished - 2010
Event23rd IEEE International Conference on Micro Electro Mechanical Systems - Hong Kong, United Kingdom
Duration: 24 Jan 201028 Jan 2010

Publication series

NameProceedings: IEEE Micro Electro Mechanical Systems
PublisherIEEE
ISSN (Print)1084-6999

Conference

Conference23rd IEEE International Conference on Micro Electro Mechanical Systems
Abbreviated titleMEMS 2010
CountryUnited Kingdom
Period24/01/1028/01/10

Keywords

  • PARTICLES

Cite this

Liu, Z., Naik, N., Bucknall, D. G., & Allen, M. G. (2010). Mechanosynthesis of three-dimensional replicated nanostructures by nanolithography-based molecular manipulation. In 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 452-455). [5442469] (Proceedings: IEEE Micro Electro Mechanical Systems). IEEE. https://doi.org/10.1109/MEMSYS.2010.5442469