Measurement of aspects of surface form using an optical differential height measurement technique

Steve Kidd, D. P. Hand, Tom Carolan, J. S. Barton, J. D C Jones

Research output: Contribution to journalArticle

Abstract

We describe a fibre interferometer for making non-contact differential height measurements of machined metal surfaces without removal from the machine tool. The system comprises a probe which produces two small laser spots (~ 7 µm diameter, 3 mm apart) on the surface, an optical fibre addressing lead and signal processing unit incorporating an optical source and detector. The probe is an extrinsic fibre optic Michelson interferometer whose arms terminate in the laser spots on the test surface, and the signal processing unit calculates the difference in local surface height between the two spots. Differential height profiles of machined aluminium surfaces and optical mirror surfaces are presented.

Original languageEnglish
Pages (from-to)1579-1582
Number of pages4
JournalMeasurement Science and Technology
Volume7
Issue number11
DOIs
Publication statusPublished - Nov 1996

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