TY - JOUR
T1 - Manufacture of a 2D optical fiber array coupler with micrometer precision for laser radar applications
AU - Chen, H.
AU - Yu, W.
AU - Wang, T.
AU - Li, H.
AU - Shen, H.
AU - Li, H.
AU - Yao, Y.
AU - Desmulliez, M. P. Y.
PY - 2015
Y1 - 2015
N2 - This article presents the manufacture of a 2D-fiber array coupler using UV-LIGA technology for the precise positioning of a two-dimensional (2D) optical fiber array. The precision of the alignment of the eight-by-eight fiber array was demonstrated to be less than 2 mu m. The average concentricity error of the fibers to the positioning holes of the array coupler had a minimum and maximum error of 1.7 mu m and 6.5 mu m, respectively. The 2D fiber array coupler can fulfill the coupling and transmission requirements of 2D light spots for laser radar applications. The method developed here can easily be extended to the manufacture of larger arrays.
AB - This article presents the manufacture of a 2D-fiber array coupler using UV-LIGA technology for the precise positioning of a two-dimensional (2D) optical fiber array. The precision of the alignment of the eight-by-eight fiber array was demonstrated to be less than 2 mu m. The average concentricity error of the fibers to the positioning holes of the array coupler had a minimum and maximum error of 1.7 mu m and 6.5 mu m, respectively. The 2D fiber array coupler can fulfill the coupling and transmission requirements of 2D light spots for laser radar applications. The method developed here can easily be extended to the manufacture of larger arrays.
KW - 2D optical fiber array
KW - micrometer precision
KW - laser radar applications
KW - ADHESIVE
UR - https://www.scopus.com/pages/publications/84920517962
U2 - 10.1088/0960-1317/25/1/015015
DO - 10.1088/0960-1317/25/1/015015
M3 - Article
AN - SCOPUS:84920517962
SN - 0960-1317
VL - 25
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 1
M1 - 015015
ER -