Abstract
This article presents the manufacture of a 2D-fiber array coupler using UV-LIGA technology for the precise positioning of a two-dimensional (2D) optical fiber array. The precision of the alignment of the eight-by-eight fiber array was demonstrated to be less than 2 mu m. The average concentricity error of the fibers to the positioning holes of the array coupler had a minimum and maximum error of 1.7 mu m and 6.5 mu m, respectively. The 2D fiber array coupler can fulfill the coupling and transmission requirements of 2D light spots for laser radar applications. The method developed here can easily be extended to the manufacture of larger arrays.
Original language | English |
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Article number | 015015 |
Number of pages | 5 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 25 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2015 |
Keywords
- 2D optical fiber array
- micrometer precision
- laser radar applications
- ADHESIVE