Low temperature B activation in SOI using optimised vacancy engineering implants

A. J. Smith*, B. Colombeau, Nick Bennett, R. M. Gwilliam, Nick E. B. Cowern, B. J. Sealy, N. Cowern

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

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Material Science

Medicine and Dentistry