Abstract
We report a step toward optoelectronic integration on low-temperature cofired ceramics substrates in the form of fiber alignment U-grooves. The precision of the CO2 laser machining of green state ceramic for this purpose is investigated. The groove-writing process with a speed of 1 mm/s was carried out in air at room temperature and ambient pressure. The process is to a large extent self-cleaning without any gas jet assist. By analysis of groove profiles after firing of a near-zero shrinkage green tape formulation, it is shown that the cutting accuracy is approximately 2 µm, which is at the fundamental limit set by the particle size (1-5 µm). We demonstrate low-loss butt coupling of <1 dB for single-mode fibers using the laser written U-grooves. The technique exhibits a potential for fabrication of low-cost fiber ribbon and fiber array connectors. © 2006 Optical Society of America.
Original language | English |
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Pages (from-to) | 9168-9175 |
Number of pages | 8 |
Journal | Applied Optics |
Volume | 45 |
Issue number | 36 |
DOIs | |
Publication status | Published - 20 Dec 2006 |