Low friction rotating devices using fluid assisted levitation

Mark Leonard; Resh Dhariwal

doi:10.1108/01445150210416682

Low friction rotating devices using fluid assisted levitation

Mark Leonard, Resh Dhariwal

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Describes the fabrication of MEMS micro bearings and the benefits that they provide. Uses the LIGA process with UV light and SU-8 photoresist to create the structures. A fluid passing through the cavity is used to lift up and levitate the rotor within the confines of the cavity.

Original language	English
Pages (from-to)	55-59
Number of pages	5
Journal	Assembly Automation
Volume	22
Issue number	1
DOIs	https://doi.org/10.1108/01445150210416682
Publication status	Published - 2002

Keywords

Bearings
Microstructures

Access to Document

10.1108/01445150210416682

Cite this

@article{6a4a7d653aa14e39a119cc8f34444a75,

title = "Low friction rotating devices using fluid assisted levitation",

abstract = "Describes the fabrication of MEMS micro bearings and the benefits that they provide. Uses the LIGA process with UV light and SU-8 photoresist to create the structures. A fluid passing through the cavity is used to lift up and levitate the rotor within the confines of the cavity.",

keywords = "Bearings, Microstructures",

author = "Mark Leonard and Resh Dhariwal",

year = "2002",

doi = "10.1108/01445150210416682",

language = "English",

volume = "22",

pages = "55--59",

journal = "Assembly Automation",

publisher = "Emerald Group Publishing Ltd.",

number = "1",

}

TY - JOUR

T1 - Low friction rotating devices using fluid assisted levitation

AU - Leonard, Mark

AU - Dhariwal, Resh

PY - 2002

Y1 - 2002

N2 - Describes the fabrication of MEMS micro bearings and the benefits that they provide. Uses the LIGA process with UV light and SU-8 photoresist to create the structures. A fluid passing through the cavity is used to lift up and levitate the rotor within the confines of the cavity.

AB - Describes the fabrication of MEMS micro bearings and the benefits that they provide. Uses the LIGA process with UV light and SU-8 photoresist to create the structures. A fluid passing through the cavity is used to lift up and levitate the rotor within the confines of the cavity.

KW - Bearings

KW - Microstructures

UR - https://www.scopus.com/pages/publications/0036253594

U2 - 10.1108/01445150210416682

DO - 10.1108/01445150210416682

M3 - Article

VL - 22

SP - 55

EP - 59

JO - Assembly Automation

JF - Assembly Automation

IS - 1

ER -

Low friction rotating devices using fluid assisted levitation

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this