Low friction rotating devices using fluid assisted levitation

Mark Leonard, Resh Dhariwal

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Describes the fabrication of MEMS micro bearings and the benefits that they provide. Uses the LIGA process with UV light and SU-8 photoresist to create the structures. A fluid passing through the cavity is used to lift up and levitate the rotor within the confines of the cavity.

Original languageEnglish
Pages (from-to)55-59
Number of pages5
JournalAssembly Automation
Volume22
Issue number1
DOIs
Publication statusPublished - 2002

Keywords

  • Bearings
  • Microstructures

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