Low friction rotating devices using fluid assisted levitation

Mark Leonard; Resh Dhariwal

doi:10.1108/01445150210416682

Low friction rotating devices using fluid assisted levitation

Mark Leonard, Resh Dhariwal

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Describes the fabrication of MEMS micro bearings and the benefits that they provide. Uses the LIGA process with UV light and SU-8 photoresist to create the structures. A fluid passing through the cavity is used to lift up and levitate the rotor within the confines of the cavity.

Original language	English
Pages (from-to)	55-59
Number of pages	5
Journal	Assembly Automation
Volume	22
Issue number	1
DOIs	https://doi.org/10.1108/01445150210416682
Publication status	Published - 2002

Keywords

Bearings
Microstructures

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10.1108/01445150210416682

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abstract = "Describes the fabrication of MEMS micro bearings and the benefits that they provide. Uses the LIGA process with UV light and SU-8 photoresist to create the structures. A fluid passing through the cavity is used to lift up and levitate the rotor within the confines of the cavity.",

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AB - Describes the fabrication of MEMS micro bearings and the benefits that they provide. Uses the LIGA process with UV light and SU-8 photoresist to create the structures. A fluid passing through the cavity is used to lift up and levitate the rotor within the confines of the cavity.

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Low friction rotating devices using fluid assisted levitation

Abstract

Keywords

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